EP 2263253 A2 20101222 - METHOD FOR FORMING POROUSCATALYTIC MATERIAL IN MICROCAVITY OR MICROPASSAGE BY MECHANOCHEMICAL POLISHING
Title (en)
METHOD FOR FORMING POROUSCATALYTIC MATERIAL IN MICROCAVITY OR MICROPASSAGE BY MECHANOCHEMICAL POLISHING
Title (de)
VERFAHREN ZUR FORMUNG EINES PORÖSEN KATALYTISCHEN MATERIALS IN EINEM MIKROHOHLRAUM ODER EINEM MIKRODURCHGANG DURCH MECHANOCHEMISCHES POLIEREN
Title (fr)
PROCÉDÉ DE FORMATION DE MATÉRIAU CATALYSEUR POREUX DANS UNE MICROCAVITÉ OU UN MICROPASSAGE PAR POLISSAGE MÉCANO-CHIMIQUE
Publication
Application
Priority
- FR 2009000369 W 20090330
- FR 0801921 A 20080408
Abstract (en)
[origin: WO2009130416A2] A surface of a substrate (2) comprising microcavities (1) leading out of the substrate is placed in contact with an aqueous solution comprising a plurality of suspended particles (4) and a fabric (3). Perpendicular pressure is applied the expanse of the substrate (2) between the fabric (3) and the surface of the substrate (2), and relative movement of the fabric (3) and the surface is applied to the expanse of the substrate. At least one particle (4) is thus fed into each microcavity (1), therein forming a porous material that is a catalyst material for nanothread or nanotube growth.
IPC 8 full level
H01L 21/316 (2006.01); C01B 31/02 (2006.01); H01L 21/762 (2006.01); H01L 21/768 (2006.01)
CPC (source: EP US)
H01L 21/02126 (2013.01 - EP US); H01L 21/02203 (2013.01 - EP US); H01L 21/02282 (2013.01 - EP US); H01L 21/31695 (2016.02 - US); H01L 21/76224 (2013.01 - EP US); H01L 21/7682 (2013.01 - EP US); H01L 21/76877 (2013.01 - EP US); H01L 23/53276 (2013.01 - EP US); H01L 21/764 (2013.01 - EP US); H01L 2221/1094 (2013.01 - EP US); H01L 2924/0002 (2013.01 - EP US)
Citation (search report)
See references of WO 2009130416A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA RS
DOCDB simple family (publication)
FR 2929756 A1 20091009; FR 2929756 B1 20100827; EP 2263253 A2 20101222; JP 2011517107 A 20110526; US 2011034329 A1 20110210; US 8562934 B2 20131022; WO 2009130416 A2 20091029; WO 2009130416 A3 20100708
DOCDB simple family (application)
FR 0801921 A 20080408; EP 09734307 A 20090330; FR 2009000369 W 20090330; JP 2011503469 A 20090330; US 93628909 A 20090330