EP 2266145 A2 20101229 - METHODS AND DEVICES FOR PROCESSING A PRECURSOR LAYER IN A GROUP VIA ENVIRONMENT
Title (en)
METHODS AND DEVICES FOR PROCESSING A PRECURSOR LAYER IN A GROUP VIA ENVIRONMENT
Title (de)
VERFAHREN UND VORRICHTUNGEN ZUR VERARBEITUNG EINER VORLÄUFERSCHICHT IN EINER GRUPPE MITHILFE VON DEREN UMGEBUNG
Title (fr)
PROCÉDÉS ET DISPOSITIFS POUR LE TRAITEMENT D'UNE COUCHE DE PRÉCURSEUR DANS UN ENVIRONNEMENT DU GROUPE VIA
Publication
Application
Priority
- US 2009036083 W 20090304
- US 3377208 P 20080304
Abstract (en)
[origin: WO2009151665A2] Methods and devices for high-throughput printing of a precursor material for forming a film of a group IB-IIIA- chalcogenide compound are disclosed. In one embodiment, the method comprises forming a precursor layer on a substrate, the precursor is subsequently processed in one or more steps in a VIA environment.
IPC 8 full level
H01L 31/042 (2006.01); H01L 21/20 (2006.01); H01L 21/324 (2006.01)
CPC (source: EP)
H01L 21/02568 (2013.01); H01L 21/02601 (2013.01); H01L 21/02614 (2013.01); H01L 31/0322 (2013.01); Y02E 10/541 (2013.01); Y02P 70/50 (2015.11)
Citation (search report)
See references of WO 2009151665A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA RS
DOCDB simple family (publication)
WO 2009151665 A2 20091217; WO 2009151665 A3 20100304; EP 2266145 A2 20101229
DOCDB simple family (application)
US 2009036083 W 20090304; EP 09762961 A 20090304