EP 2266162 B1 20111123 - RESONANCE FILTER HAVING LOW LOSS
Title (en)
RESONANCE FILTER HAVING LOW LOSS
Title (de)
RESONANZFILTER MIT GERINGEM VERLUST
Title (fr)
FILTRE À RÉSONANCE À FAIBLES PERTES
Publication
Application
Priority
- EP 2009002575 W 20090407
- DE 102008017967 A 20080408
Abstract (en)
[origin: US2011193657A1] The invention relates to a resonance filter (1) made of silicon for use in the micrometer and millimeter wave length range. Accordingly, a resonance filter having low loss and a high Q-factor is provided, comprising two layers. A first layer thereof carries only resonance cavities and a second layer carries only coupling cavities. Furthermore, a method for the production of the filter according to the invention is provided. This enables the cost-effective production of the resonance filter by means of KOH or TMAH etching technology.
IPC 8 full level
H01P 7/06 (2006.01); H01P 1/208 (2006.01); H01P 11/00 (2006.01)
CPC (source: EP US)
H01P 1/2088 (2013.01 - EP US); H01P 7/065 (2013.01 - EP US); H01P 11/002 (2013.01 - EP US); H01P 11/008 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR
DOCDB simple family (publication)
US 2011193657 A1 20110811; US 8736403 B2 20140527; AT E535040 T1 20111215; DE 102008017967 A1 20091015; DE 102008017967 B4 20150312; EP 2266162 A1 20101229; EP 2266162 B1 20111123; WO 2009124730 A1 20091015
DOCDB simple family (application)
US 93704909 A 20090407; AT 09730813 T 20090407; DE 102008017967 A 20080408; EP 09730813 A 20090407; EP 2009002575 W 20090407