EP 2277188 B1 20170419 - PLASMA GENERATOR AND METHOD FOR CONTROLLING A PLASMA GENERATOR
Title (en)
PLASMA GENERATOR AND METHOD FOR CONTROLLING A PLASMA GENERATOR
Title (de)
PLASMAERZEUGER UND VERFAHREN ZUM STEUERN EINES PLASMAERZEUGERS
Title (fr)
GÉNÉRATEUR DE PLASMA ET PROCÉDÉ DE COMMANDE D'UN GÉNÉRATEUR DE PLASMA
Publication
Application
Priority
- DE 2009000615 W 20090429
- DE 102008022181 A 20080505
Abstract (en)
[origin: WO2009135471A1] The invention relates to a plasma generator comprising a housing (20) that surrounds an ionisation chamber (5); at least one working fluid supply line (30) leading into the ionisation chamber (5), said ionisation chamber (5) comprising at least one outlet (21); and at least one electric coil arrangement (4) that surrounds at least one area of the ionisation chamber (5); said coil arrangement (4) being electrically connected to a high-frequency alternating current source (AC) that is designed such that a high frequency electric alternating current is applied to at least one coil of the coil arrangement (4). Said plasma generator is characterised in that an additional current source (DC) is designed such that a DC current or an alternating voltage is applied at a lower frequency than the voltage supplied by the high frequency alternating current source (AC) to at least one coil of the coil arrangement (4), is provided.
IPC 8 full level
H05H 1/54 (2006.01)
CPC (source: EP US)
F03H 1/0056 (2013.01 - EP US); H01J 27/18 (2013.01 - EP US); H05H 1/54 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2009135471 A1 20091112; DE 102008022181 A1 20091119; DE 102008022181 B4 20190502; EP 2277188 A1 20110126; EP 2277188 B1 20170419; JP 2011522357 A 20110728; JP 2015097209 A 20150521; JP 6000325 B2 20160928; KR 101360684 B1 20140207; KR 20110013449 A 20110209; RU 2010149265 A 20120627; RU 2525442 C2 20140810; US 2012019143 A1 20120126; US 8786192 B2 20140722
DOCDB simple family (application)
DE 2009000615 W 20090429; DE 102008022181 A 20080505; EP 09741744 A 20090429; JP 2011507789 A 20090429; JP 2014250915 A 20141211; KR 20107027366 A 20090429; RU 2010149265 A 20090429; US 99100609 A 20090429