EP 2279422 A1 20110202 - MICROMECHANICAL ACCELERATION SENSOR
Title (en)
MICROMECHANICAL ACCELERATION SENSOR
Title (de)
MIKROMECHANISCHER BESCHLEUNIGUNGSSENSOR
Title (fr)
CAPTEUR D'ACCELERATION MICROMECANIQUE
Publication
Application
Priority
- EP 2009055942 W 20090515
- DE 102008023664 A 20080515
Abstract (en)
[origin: WO2009138498A1] Micromechanical acceleration sensor, comprising at least one first seismic mass (2) that is suspended in a deflectable manner, at least one readout device (3a, 4a; 3b, 4b) for detecting the deflection of the first seismic mass and at least one resetting device (5).
IPC 8 full level
G01P 15/125 (2006.01); G01P 15/13 (2006.01); G01P 15/18 (2006.01)
CPC (source: EP US)
G01P 15/125 (2013.01 - EP US); G01P 15/131 (2013.01 - EP US); G01P 15/18 (2013.01 - EP US)
Citation (search report)
See references of WO 2009138498A1
Citation (examination)
- WO 03104823 A1 20031218 - CONTI TEMIC MICROELECTRONIC [DE], et al
- US 2006156818 A1 20060720 - KAPSER KONRAD [DE], et al
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA RS
DOCDB simple family (publication)
WO 2009138498 A1 20091119; WO 2009138498 A9 20100121; DE 102009021567 A1 20091231; EP 2279422 A1 20110202; US 2011113880 A1 20110519
DOCDB simple family (application)
EP 2009055942 W 20090515; DE 102009021567 A 20090515; EP 09745830 A 20090515; US 99240109 A 20090515