EP 2286175 A1 20110223 - INTERFEROMETRIC DEFECT DETECTION AND CLASSIFICATION
Title (en)
INTERFEROMETRIC DEFECT DETECTION AND CLASSIFICATION
Title (de)
INTERFEROMETRISCHE DEFEKTDETEKTION UND KLASSIFIKATION
Title (fr)
DÉTECTION ET CLASSIFICATION PAR INTERFÉROMÉTRIE DE DÉFAUTS
Publication
Application
Priority
- US 2009045999 W 20090602
- US 21051309 P 20090319
- US 18951008 P 20080820
- US 18950908 P 20080820
- US 19014408 A 20080812
- US 13072908 P 20080603
- US 13561608 P 20080722
- US 18950808 P 20080820
Abstract (en)
[origin: WO2009149103A1] Systems and methods for using common-path interferometric imaging for defect detection and classification are described. An illumination source generates and directs coherent light toward the sample. An optical imaging system collects light reflected or transmitted from the sample including a scattered component and a specular component that is predominantly undiffracted by the sample. A variable phase controlling system is used to adjust the relative phase of the scattered component and the specular component so as to change the way they interfere at the image plane. The resultant signal is compared to a reference signal for the same location on the sample and a difference above threshold is considered to be a defect. The process is repeated multiple times each with a different relative phase shift and each defect location and the difference signals are stored in memory. This data is used to calculate an amplitude and phase for each defect.
IPC 8 full level
G01B 9/02 (2006.01)
CPC (source: EP KR)
G01B 9/02 (2013.01 - KR); G01N 21/88 (2013.01 - KR); G01N 21/9501 (2013.01 - EP); H01L 21/00 (2013.01 - KR); G01N 21/45 (2013.01 - EP)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA RS
DOCDB simple family (publication)
WO 2009149103 A1 20091210; CN 102089616 A 20110608; CN 102089616 B 20130313; EP 2286175 A1 20110223; EP 2286175 A4 20170412; JP 2011523711 A 20110818; JP 5444334 B2 20140319; KR 101556430 B1 20151001; KR 20110031306 A 20110325
DOCDB simple family (application)
US 2009045999 W 20090602; CN 200980121352 A 20090602; EP 09759262 A 20090602; JP 2011512587 A 20090602; KR 20117000031 A 20090602