EP 2296979 A1 20110323 - SYSTEM AND METHOD FOR A STERILIZATION CHAMBER IN A FILLING MACHINE
Title (en)
SYSTEM AND METHOD FOR A STERILIZATION CHAMBER IN A FILLING MACHINE
Title (de)
SYSTEM UND VERFAHREN FÜR EINE STERILISIERUNGSKAMMER IN EINER BEFÜLLUNGSMASCHINE
Title (fr)
SYSTÈME ET PROCÉDÉ POUR CHAMBRE DE STÉRILISATION DE MACHINE DE REMPLISSAGE
Publication
Application
Priority
- SE 2009000243 W 20090513
- SE 0801290 A 20080602
Abstract (en)
[origin: WO2009148373A1] A microelectromechanical system (MEMS) transducer (1000) comprises a diaphragm (705) and a back plate (604). The diaphragm and back plate are spaced apart and are made of semiconductor material using microelectronic fabrication techniques. The transducer also includes a pedestal (601 ) comprising a cavity. The pedestal has a first end and a second end, and the back plate of the transducer is affixed to the first end, substantially covering the cavity. An extension member is affixed to the second end of the pedestal, enlarging the back volume of the transducer.
IPC 8 full level
B65B 63/08 (2006.01); B65B 55/10 (2006.01)
CPC (source: EP)
B65B 55/06 (2013.01); B65B 55/103 (2013.01); B65B 9/20 (2013.01)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA RS
DOCDB simple family (publication)
WO 2009148373 A1 20091210; WO 2009148373 A8 20100902; BR PI0913087 A2 20151013; CN 101596953 A 20091209; CN 101596953 B 20150415; EP 2296979 A1 20110323; EP 2296979 A4 20131009; EP 2296979 B1 20141112; RU 2010154125 A 20120720; RU 2502649 C2 20131227
DOCDB simple family (application)
SE 2009000243 W 20090513; BR PI0913087 A 20090513; CN 200810167486 A 20081010; EP 09758600 A 20090513; RU 2010154125 A 20090513