EP 2306489 A1 20110406 - Method for coating a substrate and coater
Title (en)
Method for coating a substrate and coater
Title (de)
Verfahren zur Beschichtung eines Substrats und Beschichtungsanlage
Title (fr)
Procédé de revêtement d'un substrat et dispositif de revêtement
Publication
Application
Priority
EP 09172133 A 20091002
Abstract (en)
A method is provided for coating substrates with at least one cathode assembly (10) having a rotatable target (20), the rotatable target being provided with at least one magnet assembly (25) positioned there within. The method includes providing a potential difference between the substrate and the rotatable target that is varied over time during coating. Further, the method may include positioning the magnet assembly (25) with respect to the rotatable target so that the magnet assembly is asymmetrically aligned with respect to a plane perpendicularly extending from the substrate to the axis of the rotatable target for a predetermined first time interval. The magnet assembly is then moved to a second position that is also asymmetrically aligned. Further, a coater for coating substrates is provided including a cathode assembly with a rotatable curved target and two magnet assemblies positioned within the rotatable curved target.
IPC 8 full level
H01J 37/34 (2006.01)
CPC (source: CN EP KR US)
H01J 37/3405 (2013.01 - CN EP KR US); H01J 37/3452 (2013.01 - CN EP KR US); H01J 37/3455 (2013.01 - CN EP KR US); H01J 37/3461 (2013.01 - KR)
Citation (search report)
- [XI] WO 2009022184 A2 20090219 - GENCOA LTD [GB], et al
- [X] US 2002189939 A1 20021219 - GERMAN JOHN R [US], et al
- [X] US 2008289957 A1 20081127 - TAKIGAWA SHIROU [JP], et al
- [X] US 2007089983 A1 20070426 - PLAISTED DEAN [US], et al
- [X] US 5384021 A 19950124 - THWAITES MICHAEL J [GB]
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
Designated extension state (EPC)
AL BA RS
DOCDB simple family (publication)
EP 2306489 A1 20110406; CN 102549706 A 20120704; CN 102549706 B 20160302; CN 104766779 A 20150708; CN 104766779 B 20170725; EP 2483907 A1 20120808; EP 2483907 B1 20160727; JP 2013506756 A 20130228; JP 2015148014 A 20150820; JP 2015158013 A 20150903; JP 2017128813 A 20170727; JP 5993974 B2 20160921; JP 6104967 B2 20170329; JP 6385487 B2 20180905; KR 101708194 B1 20170220; KR 101709520 B1 20170223; KR 20120092619 A 20120821; KR 20150052359 A 20150513; TW 201113927 A 20110416; TW 201530606 A 20150801; TW 201539524 A 20151016; TW I494969 B 20150801; TW I567777 B 20170121; TW I578371 B 20170411; US 2011079508 A1 20110407; US 2012273343 A1 20121101; WO 2011039316 A1 20110407
DOCDB simple family (application)
EP 09172133 A 20091002; CN 201080044690 A 20100930; CN 201510157919 A 20100930; EP 10760679 A 20100930; EP 2010064574 W 20100930; JP 2012531432 A 20100930; JP 2015042897 A 20150304; JP 2015042898 A 20150304; JP 2017038029 A 20170301; KR 20127011388 A 20100930; KR 20157010836 A 20100930; TW 104110304 A 20101001; TW 104120776 A 20101001; TW 99133598 A 20101001; US 201013499651 A 20100930; US 57707309 A 20091009