EP 2308082 A1 20110413 - SYSTEM AND METHOD FOR MANUFACTURING THIN FILM ELECTRICAL DEVICES
Title (en)
SYSTEM AND METHOD FOR MANUFACTURING THIN FILM ELECTRICAL DEVICES
Title (de)
SYSTEM UND VERFAHREN ZUR HERSTELLUNG VON ELEKTRISCHEN DÜNNFILMBAUELEMENTEN
Title (fr)
SYSTÈME ET PROCÉDÉ DE FABRICATION DE DISPOSITIFS ÉLECTRIQUES À COUCHE MINCE
Publication
Application
Priority
US 2008009182 W 20080730
Abstract (en)
[origin: WO2010014058A1] A system for manufacturing a thin film electrical device is provided in accordance with an exemplary embodiment. The system includes a chamber and a gas gate. The chamber includes accumulating apparatus therein configured for gathering a portion of the substrate within the chamber. The gas gate provides fluid communication between a pressure region of the chamber and a second pressure region.
IPC 8 full level
H01L 21/335 (2006.01)
CPC (source: EP)
C23C 14/562 (2013.01); C23C 14/564 (2013.01); H01L 21/67173 (2013.01); H01L 21/6776 (2013.01)
Citation (search report)
See references of WO 2010014058A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA MK RS
DOCDB simple family (publication)
WO 2010014058 A1 20100204; CN 102113103 A 20110629; EP 2308082 A1 20110413; JP 2011529532 A 20111208
DOCDB simple family (application)
US 2008009182 W 20080730; CN 200880130590 A 20080730; EP 08794858 A 20080730; JP 2011521067 A 20080730