EP 2308243 A1 20110413 - MICROMECHANICAL COMPONENT WITH REAR VOLUME
Title (en)
MICROMECHANICAL COMPONENT WITH REAR VOLUME
Title (de)
MIKROMECHANISCHES BAUELEMENT MIT RÜCKVOLUMEN
Title (fr)
COMPOSANT MICROMÉCANIQUE AVEC VOLUME POSTÉRIEUR
Publication
Application
Priority
- EP 2009056774 W 20090603
- DE 102008040597 A 20080722
Abstract (en)
[origin: WO2010009934A1] The invention relates to a micromechanical component or a method for manufacturing such a component, wherein a cavity (270) is produced in the substrate starting from an opening (215) at the rear of a monocrystal semiconductor substrate (200). The process used for this purpose is controlled in connection with the monocrystal semiconductor substrate used such that a largely rectangular cavity is formed.
IPC 8 full level
H04R 19/00 (2006.01); G01L 9/00 (2006.01); H04R 31/00 (2006.01)
CPC (source: EP US)
B81C 1/00047 (2013.01 - EP US); B81C 1/00103 (2013.01 - EP US); H04R 19/005 (2013.01 - EP US); H04R 31/00 (2013.01 - EP US); B81B 2201/0257 (2013.01 - EP US); B81B 2203/0315 (2013.01 - EP US); B81B 2203/0392 (2013.01 - EP US)
Citation (search report)
See references of WO 2010009934A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA RS
DOCDB simple family (publication)
DE 102008040597 A1 20100128; CN 102106161 A 20110622; CN 102106161 B 20140604; EP 2308243 A1 20110413; US 2011198713 A1 20110818; US 8692339 B2 20140408; WO 2010009934 A1 20100128
DOCDB simple family (application)
DE 102008040597 A 20080722; CN 200980128720 A 20090603; EP 09779612 A 20090603; EP 2009056774 W 20090603; US 73752109 A 20090603