EP 2310823 A1 20110420 - METHOD FOR DETERMINING AN OVERALL LEAKAGE RATE OF A VACUUM SYSTEM AND VACUUM SYSTEM
Title (en)
METHOD FOR DETERMINING AN OVERALL LEAKAGE RATE OF A VACUUM SYSTEM AND VACUUM SYSTEM
Title (de)
VERFAHREN ZUR BESTIMMUNG EINER GESAMT-LECKRATE EINER VAKUUMANLAGE SOWIE VAKUUMANLAGE
Title (fr)
PROCÉDÉ POUR DÉTERMINER UN TAUX DE FUITE GLOBAL D'UNE INSTALLATION DE VIDE ET INSTALLATION DE VIDE
Publication
Application
Priority
- EP 2009060169 W 20090805
- DE 102008037058 A 20080808
Abstract (en)
[origin: WO2010015663A1] A method for determining an overall leakage rate of a vacuum system can be operated continuously or cyclically. The vacuum system comprises at least one process chamber (10) and a pumping device (16) connected to the process chamber (10). In a cyclical determination method according to the invention, the following steps are taken: suppressing a process gas feed to the process chamber (10), feeding a carrier gas to the process chamber (10), conveying the carrier gas and a leakage gas using the pumping device (16), measuring an amount of a gas component in the pumped gas, and determining the overall leakage rate of the vacuum system based on the measured amount of the gas component.
IPC 8 full level
CPC (source: EP KR US)
G01M 3/20 (2013.01 - KR); G01M 3/202 (2013.01 - EP US); G01M 3/22 (2013.01 - KR); G01M 3/226 (2013.01 - EP US)
Citation (search report)
See references of WO 2010015663A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
Designated extension state (EPC)
AL BA RS
DOCDB simple family (publication)
DE 102008037058 A1 20100211; CN 102105770 A 20110622; EP 2310823 A1 20110420; JP 2011530693 A 20111222; KR 20110038736 A 20110414; RU 2011108222 A 20120920; TW 201011272 A 20100316; US 2011197659 A1 20110818; WO 2010015663 A1 20100211
DOCDB simple family (application)
DE 102008037058 A 20080808; CN 200980129556 A 20090805; EP 09781528 A 20090805; EP 2009060169 W 20090805; JP 2011521573 A 20090805; KR 20117005470 A 20090805; RU 2011108222 A 20090805; TW 98126512 A 20090806; US 200913057774 A 20090805