EP 2315237 B1 20190501 - VERTICAL HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
Title (en)
VERTICAL HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
Title (de)
VORRICHTUNG FÜR VERTIKALE WÄRMEBEHANDLUNG UND VERFAHREN FÜR VERTIKALE WÄRMEBEHANDLUNG
Title (fr)
APPAREIL VERTICAL DE TRAITEMENT THERMIQUE ET PROCÉDÉ DE TRAITEMENT THERMIQUE
Publication
Application
Priority
- JP 2009003392 W 20090721
- JP 2008209070 A 20080814
Abstract (en)
[origin: EP2315237A1] According to the present invention, there is provided a vertical heat treatment apparatus which is a vertical heat treatment furnace comprising at least: a reaction tube; a heat treatment boat configured to hold a substrate; a heater configured to heat the substrate; a gas introduction tube configured to introduce an atmospheric gas into the reaction tube; a gas supply tube connected to the gas introduction tube; and a gas port portion that is formed at a flange body provided under the reaction tube or the reaction tube and into which the gas introduction tube is inserted, wherein the gas introduction tube is connected to the gas supply tube through a joint outside the reaction tube, the joint has at least a metal short tube having a flange portion, and the gas introduction tube is inserted into a through hole formed by connecting the flange portion of the metal short tube to the flange portion provided at the gas port portion through an O-ring and further connected to the gas supply tube through the joint. As a result, there can be provided the vertical heat treatment apparatus that can avoid damages to the gas introduction tube and easily achieve connection between the gas introduction tube and the gas supply tube without haze on a substrate.
IPC 8 full level
H01L 21/324 (2006.01); H01L 21/22 (2006.01); H01L 21/31 (2006.01); H01L 21/67 (2006.01)
CPC (source: EP US)
H01L 21/324 (2013.01 - EP US); H01L 21/67017 (2013.01 - EP US); H01L 21/67109 (2013.01 - EP US); Y10T 117/1016 (2015.01 - EP US)
Citation (examination)
US 6375194 B1 20020423 - PENG JYH WEN [TW]
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
EP 2315237 A1 20110427; EP 2315237 A4 20120509; EP 2315237 B1 20190501; CN 102124547 A 20110713; CN 102124547 B 20140528; JP 2010045251 A 20100225; JP 5176771 B2 20130403; KR 101587238 B1 20160120; KR 20110052610 A 20110518; TW 201021126 A 20100601; TW I445090 B 20140711; US 2011139319 A1 20110616; US 8821656 B2 20140902; WO 2010018654 A1 20100218
DOCDB simple family (application)
EP 09806550 A 20090721; CN 200980131526 A 20090721; JP 2008209070 A 20080814; JP 2009003392 W 20090721; KR 20117003030 A 20090721; TW 98125109 A 20090724; US 200913057632 A 20090721