EP 2318322 A1 20110511 - DEVICE AND METHOD FOR ACCOMMODATING AND RETAINING FLAT OBJECTS WITHOUT CONTACT AND FOR CONVEYING FLAT OBJECTS
Title (en)
DEVICE AND METHOD FOR ACCOMMODATING AND RETAINING FLAT OBJECTS WITHOUT CONTACT AND FOR CONVEYING FLAT OBJECTS
Title (de)
VORRICHTUNG UND VERFAHREN ZUM BERÜHRUNGSLOSEN AUFNEHMEN UND HALTEN SOWIE ZUM FÖRDERN VON FLACHEN GEGENSTÄNDEN
Title (fr)
DISPOSITIF ET PROCEDE POUR RECEVOIR SANS CONTACT ET MAINTENIR ET EGALEMENT POUR TRANSPORTER DES OBJETS PLATS
Publication
Application
Priority
EP 2009006657 W 20090915
Abstract (en)
[origin: WO2011032567A1] The invention relates to a device and a method for conveying flat objects (16), such as in particular semiconductor substrates (wafers) made of thin, fragile material. In particular, the invention relates to a device and a method by means of which the objects (16) can be accommodated without contact. According to the invention, the device (1) comprises a conveying means (6), wherein the conveying process occurs in contact with the conveying means. The device (1) further comprises a retaining apparatus that provides retaining forces. According to the invention, a flat object (16) can be lifted in the direction of the conveying means (6) by means of the retaining forces and can then be fixed on the underside thereof.
IPC 8 full level
C03B 35/00 (2006.01); H01L 21/677 (2006.01); H01L 21/683 (2006.01)
CPC (source: EP)
B65G 49/061 (2013.01); B65G 49/066 (2013.01); H01L 21/67706 (2013.01); H01L 21/6838 (2013.01); B65G 2249/045 (2013.01)
Citation (search report)
See references of WO 2011032567A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
Designated extension state (EPC)
AL BA RS
DOCDB simple family (publication)
DOCDB simple family (application)
EP 2009006657 W 20090915; EP 09736121 A 20090915