EP 2321844 A1 20110518 - COATING SYSTEM
Title (en)
COATING SYSTEM
Title (de)
BESCHICHTUNGSANLAGE
Title (fr)
INSTALLATION DE REVETEMENT
Publication
Application
Priority
- EP 2009060994 W 20090826
- DE 102008045249 A 20080901
- DE 102009018700 A 20090423
Abstract (en)
[origin: WO2010023221A1] The invention provides a coating system for coating substrates in cyclical operation. The process stations of the coating system are disposed in a circular fashion. A handling mechanism is provided for transferring the substrate between the process stations. The process stations comprise a lock for loading and unloading the substrate, at least two coating chambers, each of which comprises a plasma source for stationary coating of the substrate, and preferably a heating station.
IPC 8 full level
H01L 21/677 (2006.01)
CPC (source: EP US)
C23C 16/54 (2013.01 - EP US); H01L 21/67167 (2013.01 - EP US); H01L 21/67213 (2013.01 - EP US)
Citation (search report)
See references of WO 2010023221A1
Citation (examination)
- US 3915117 A 19751028 - SCHERTLER ROMAN
- EP 0737968 A1 19961016 - LEYBOLD AG [DE]
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
Designated extension state (EPC)
AL BA RS
DOCDB simple family (publication)
DE 102009018700 A1 20100304; DE 102009018700 B4 20200213; DE 202009018759 U1 20130128; EP 2321844 A1 20110518; US 2011195199 A1 20110811; WO 2010023221 A1 20100304
DOCDB simple family (application)
DE 102009018700 A 20090423; DE 202009018759 U 20090826; EP 09782212 A 20090826; EP 2009060994 W 20090826; US 73790009 A 20090826