EP 2323153 A1 20110518 - MEMS switches and the packaging thereof
Title (en)
MEMS switches and the packaging thereof
Title (de)
MEMS-Schalter und deren Verpackung
Title (fr)
Commutateurs MEMS et leur conditionnement
Publication
Application
Priority
EP 09275107 A 20091111
Abstract (en)
A MEMS switch comprising a pair of contact-making surfaces, at least one of which is movable relative to the other to open or close the switch, a said surface being carried by a flexible element, and actuator means configured to effect said relative movement, the arrangement being such that when the switch is closed the flexible element is deformed to conform the contacting surface defined thereon to the other contacting surface.
IPC 8 full level
H01H 59/00 (2006.01)
CPC (source: EP)
H01H 59/0009 (2013.01); H01H 2001/0084 (2013.01)
Citation (search report)
- [XA] WO 03023805 A1 20030320 - MCNC [US], et al
- [A] US 6236491 B1 20010522 - GOODWIN-JOHANSSON SCOTT HALDEN [US]
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
DOCDB simple family (application)
EP 09275107 A 20091111