EP 2330299 A4 20160615 - VACUUM EVACUATION DEVICE
Title (en)
VACUUM EVACUATION DEVICE
Title (de)
VORRICHTUNG FÜR VAKUUMENTLEERUNG
Title (fr)
DISPOSITIF D'ÉVACUATION DE VIDE
Publication
Application
Priority
- JP 2009004496 W 20090910
- JP 2008232324 A 20080910
Abstract (en)
[origin: EP2330299A1] A vacuum evacuation device including: a main pump; an auxiliary pump connected in series to the main pump; and an inter-pump piping for interconnecting an outlet of the main pump and an inlet of the auxiliary pump, wherein the main pump includes a mechanical booster pump; a ratio of the maximum power of a motor for the main pump to the maximum pumping rate of the main pump is no less than 5 W/(m 3 /h); the inter-pump piping includes a branch pipe branched from the middle of the inter-pump piping; and a check valve for releasing gas in the inter-pump piping and preventing a back flow of the gas is provided in the middle of the branch pipe.
IPC 8 full level
F04B 37/14 (2006.01); F04B 41/06 (2006.01); F04C 23/00 (2006.01); F04C 25/02 (2006.01)
CPC (source: EP KR US)
F04B 37/10 (2013.01 - KR); F04B 37/14 (2013.01 - EP US); F04B 37/16 (2013.01 - KR); F04B 39/10 (2013.01 - KR); F04B 41/06 (2013.01 - EP US)
Citation (search report)
- [Y] US 2004173312 A1 20040909 - SHIBAYAMA KOUJI [JP], et al
- [Y] JP 2007231935 A 20070913 - EBARA DENSAN LTD, et al
- [A] US 3642384 A 19720215 - HUSE HENRY
- [A] EP 1906022 A1 20080402 - ANEST IWATA CORP [JP]
- [A] WO 2006082366 A1 20060810 - BOC GROUP PLC [GB], et al
- See references of WO 2010029750A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
EP 2330299 A1 20110608; EP 2330299 A4 20160615; CN 102124225 A 20110713; JP WO2010029750 A1 20120202; KR 101193479 B1 20121022; KR 20110040980 A 20110420; TW 201018790 A 20100516; TW I467092 B 20150101; US 2011164992 A1 20110707; WO 2010029750 A1 20100318
DOCDB simple family (application)
EP 09812899 A 20090910; CN 200980132175 A 20090910; JP 2009004496 W 20090910; JP 2010528647 A 20090910; KR 20117005262 A 20090910; TW 98130464 A 20090909; US 200913063040 A 20090910