EP 2332001 B1 20181024 - SCANNING MIRROR CONTROL HAVING LEAST MEAN SQUARE TONE ADDER
Title (en)
SCANNING MIRROR CONTROL HAVING LEAST MEAN SQUARE TONE ADDER
Title (de)
ABTASTSPIEGELSTEUERUNG MIT TONERZUSATZ MIT MINDESTMITTELWERTQUADRAT
Title (fr)
COMMANDE DE MIROIR DE BALAYAGE UTILISANT UN ADDITIONNEUR DE TONS DU TYPE PAR MOINDRES CARRÉS MOYENS
Publication
Application
Priority
- US 2009056036 W 20090904
- US 23971108 A 20080926
Abstract (en)
[origin: US2010079836A1] A scanning beam projection system includes a scanning mirror having a fast-scan axis and a slow-scan axis. Movement on the slow-scan axis is controlled by a slow-scan scanning mirror control system. The control system receives position information describing angular displacement of the mirror. An outer loop of the control system includes least mean square (LMS) tone adders that determine harmonically related signals that when combined produce a scanning mirror drive signal. An inner loop of the control system compensates for a scanning mirror resonant vibration mode at a frequency within the frequency band occupied by the harmonically related signals.
IPC 8 full level
G02B 26/08 (2006.01); G02B 26/10 (2006.01)
CPC (source: EP US)
G02B 26/101 (2013.01 - EP US)
Citation (examination)
- US 6040567 A 20000321 - NEHER ERWIN [DE], et al
- SHIWEI ZHOU ET AL: "Pre-compensated excitation waveform to suppress second harmonic generation in MEMS electrostatic transducers", 2003 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS. HONOLULU, HAWAII, OCT. 5 - 8, 2003; [IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS], NEW YORK, NY : IEEE, US, vol. 1, 5 October 2003 (2003-10-05), pages 477 - 480, XP010702052, ISBN: 978-0-7803-7922-0
- KWADWO OSEI OWUSU: "NONLINEAR CONTROL OF MICROELECTROMECHANICALSYSTEMS (MEMS) DEVICES.", 1 August 2006 (2006-08-01), Retrieved from the Internet <URL:https://uta-ir.tdl.org/uta-ir/bitstream/handle/10106/162/umi-uta-1435.pdf?sequence=1> [retrieved on 20151102]
- BERGMAN K ET AL: "Design and Nonlinear Servo Control of MEMS Mirrors and Their Performance in a Large Port-Count Optical Switch", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, IEEE SERVICE CENTER, US, vol. 14, no. 2, 1 April 2005 (2005-04-01), pages 261 - 273, XP011129736, ISSN: 1057-7157, DOI: 10.1109/JMEMS.2004.839827
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
US 2010079836 A1 20100401; US 7948668 B2 20110524; CN 102216829 A 20111012; CN 102216829 B 20130918; EP 2332001 A2 20110615; EP 2332001 A4 20140326; EP 2332001 B1 20181024; JP 2012503794 A 20120209; JP 5543470 B2 20140709; WO 2010036504 A2 20100401; WO 2010036504 A3 20100520
DOCDB simple family (application)
US 23971108 A 20080926; CN 200980145706 A 20090904; EP 09816686 A 20090904; JP 2011529072 A 20090904; US 2009056036 W 20090904