EP 2334977 A1 20110622 - DEVICE COMPRISING A CAVITY UNDER VACUUM, AND CORRESPONDING DETECTOR, SENSOR AND METHOD OF MANUFACTURE
Title (en)
DEVICE COMPRISING A CAVITY UNDER VACUUM, AND CORRESPONDING DETECTOR, SENSOR AND METHOD OF MANUFACTURE
Title (de)
VORRICHTUNG MIT EINER VERTIEFUNG UNTER VAKUUM UND ENTSPRECHENDER DETEKTOR, SENSOR UND HERSTELLUNGSVERFAHREN
Title (fr)
DISPOSITIF COMPORTANT UNE CAVITE SOUS VIDE, SENSEUR, CAPTEUR ET PROCEDE DE FABRICATION CORRESPONDANTS
Publication
Application
Priority
- EP 2009058702 W 20090708
- FR 0854649 A 20080708
Abstract (en)
[origin: WO2010003989A1] The invention relates to a device (2) characterized in that it comprises - a non-temperature-regulated cavity (20) under vacuum having an internal surface (25), and - a purifier positioned in the cavity and able by physisorption to absorb impurities (11) present in the cavity (20) and having a developed surface (101) such that the ratio between, on the one hand, the area of the said developed surface (101) and, on the other hand, the area of the internal surface (25) of the cavity (20) is greater than 100. It also relates to a detector or a sensor comprising such a device and to a method of manufacture of such a device.
IPC 8 full level
F17C 3/08 (2006.01); G01J 1/00 (2006.01); G01J 3/00 (2006.01); G01N 21/00 (2006.01)
CPC (source: EP)
G01J 5/04 (2013.01); G01J 5/045 (2013.01); H01L 23/26 (2013.01); H01L 2924/0002 (2013.01)
C-Set (source: EP)
Citation (search report)
See references of WO 2010003989A1
Citation (examination)
DD 204742 A1 19831207 - FRODL HORST, et al
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
Designated extension state (EPC)
AL BA RS
DOCDB simple family (publication)
WO 2010003989 A1 20100114; EP 2334977 A1 20110622; FR 2933625 A1 20100115; FR 2933625 B1 20120120
DOCDB simple family (application)
EP 2009058702 W 20090708; EP 09793951 A 20090708; FR 0854649 A 20080708