EP 2347134 A1 20110727 - TURBOMOLECULAR PUMP
Title (en)
TURBOMOLECULAR PUMP
Title (de)
TURBOMOLEKULARPUMPE
Title (fr)
POMPE TURBOMOLÉCULAIRE
Publication
Application
Priority
- EP 2009065141 W 20091113
- DE 102008058151 A 20081120
Abstract (en)
[origin: WO2010057834A1] A turbomolecular pump comprises a rotor element (12) disposed in a pump housing (18). The rotor element (12) is surrounded by a stator element (24). An intermediate chamber (36) is provided between the stator element (24) and the pump housing (18). An energy absorption element (44) is disposed in the intermediate chamber (36) for the purposes of absorbing energy in case of a bursting of the rotor element (12).
IPC 8 full level
F01D 21/04 (2006.01); F04D 19/04 (2006.01); F04D 29/52 (2006.01)
CPC (source: EP)
F04D 19/042 (2013.01); F04D 27/008 (2013.01); F04D 29/522 (2013.01)
Citation (search report)
See references of WO 2010057834A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
Designated extension state (EPC)
AL BA RS
DOCDB simple family (publication)
DE 102008058151 A1 20100527; EP 2347134 A1 20110727; JP 2012509432 A 20120419; JP 5552127 B2 20140716; TW 201028549 A 20100801; WO 2010057834 A1 20100527
DOCDB simple family (application)
DE 102008058151 A 20081120; EP 09751922 A 20091113; EP 2009065141 W 20091113; JP 2011536834 A 20091113; TW 98138049 A 20091110