EP 2347427 A2 20110727 - VHF ASSEMBLY
Title (en)
VHF ASSEMBLY
Title (de)
VHF-ANORDNUNG
Title (fr)
DISPOSITIF VHF
Publication
Application
Priority
- EP 2009007759 W 20091029
- DE 102008053703 A 20081029
- DE 102008054144 A 20081031
- DE 102009014414 A 20090326
Abstract (en)
[origin: WO2010049158A2] The invention relates to a VHF plasma electrode comprising a preferably prismatic, elongated electrode body having an electrode surface that is or can be electrically connected to at least two connecting elements for supplying electric power, at least one first connecting element being coupled to or in the vicinity of a first front face and at least one second connecting element being coupled to or in the vicinity of a second front face of the electrode body, and the electrode is preferably located in a potting compound consisting of a dielectric material that does not cover the electrode surface. Preferably a shielding element that does not cover the electrode surface and that surrounds the electrode together with the potting compound is provided. The electrode is characterised in that at least one of the connecting elements is designed as a VHF vacuum feedthrough element.
IPC 8 full level
H01J 37/32 (2006.01)
CPC (source: EP)
H01J 37/32009 (2013.01); H01J 37/32036 (2013.01); H01J 37/32091 (2013.01); H01J 37/32541 (2013.01); H01J 37/32577 (2013.01)
Citation (search report)
See references of WO 2010049158A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
Designated extension state (EPC)
AL BA RS
DOCDB simple family (publication)
WO 2010049158 A2 20100506; WO 2010049158 A3 20100701; DE 102009014414 A1 20100512; EP 2347427 A2 20110727; JP 2012507126 A 20120322; TW 201024453 A 20100701
DOCDB simple family (application)
EP 2009007759 W 20091029; DE 102009014414 A 20090326; EP 09759655 A 20091029; JP 2011533610 A 20091029; TW 98137045 A 20091029