EP 2351170 A1 20110803 - METHOD AND APPARATUS FOR LASER CONTROL IN A TWO CHAMBER GAS DISCHARGE LASER
Title (en)
METHOD AND APPARATUS FOR LASER CONTROL IN A TWO CHAMBER GAS DISCHARGE LASER
Title (de)
VERFAHREN UND VORRICHTUNG ZUR LASERSTEUERUNG BEI EINEM ZWEIKAMMERN-GASENTLADUNGSLASER
Title (fr)
PROCÉDÉ ET APPAREIL POUR COMMANDE LASER DANS UN LASER À DÉCHARGE DE GAZ À DEUX CHAMBRES
Publication
Application
Priority
- US 2009005694 W 20091020
- US 25538508 A 20081021
- US 25536708 A 20081021
- US 25534708 A 20081021
Abstract (en)
[origin: WO2010047771A1] A laser control system contains an oscillator gas chamber and an amplifier gas chamber. A first voltage input is operatively connected to deliver electrical pulses to a first pair of electrodes within the oscillator gas chamber and a second pair of electrodes within the amplifier gas chamber. An output of the gas chambers is an energy dose calculated by a trapezoidal window. A control circuit connects to the first voltage input for modifying the first voltage input. A feedback control loop communicates an output of the gas chambers to the control circuit for modifying the first voltage input.
IPC 8 full level
H01S 3/13 (2006.01); H01S 3/104 (2006.01)
CPC (source: EP KR)
G03F 7/70025 (2013.01 - EP KR); H01S 3/0057 (2013.01 - KR); H01S 3/034 (2013.01 - KR); H01S 3/104 (2013.01 - EP KR); H01S 3/13 (2013.01 - EP KR); H01S 3/2325 (2013.01 - KR); H01S 3/0057 (2013.01 - EP); H01S 3/034 (2013.01 - EP); H01S 3/2325 (2013.01 - EP)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
WO 2010047771 A1 20100429; EP 2351170 A1 20110803; EP 2351170 A4 20130410; JP 2012506634 A 20120315; JP 2015111718 A 20150618; KR 101742715 B1 20170601; KR 20110086020 A 20110727; TW 201023462 A 20100616; TW I389409 B 20130311
DOCDB simple family (application)
US 2009005694 W 20091020; EP 09822307 A 20091020; JP 2011533167 A 20091020; JP 2015022469 A 20150206; KR 20117010145 A 20091020; TW 98135413 A 20091020