EP 2354546 B1 20190612 - MEMBRANE VACUUM PUMP
Title (en)
MEMBRANE VACUUM PUMP
Title (de)
MEMBRANVAKUUMPUMPE
Title (fr)
POMPE SOUS VIDE À MEMBRANE
Publication
Application
Priority
DE 202010002145 U 20100209
Abstract (en)
[origin: EP2354546A1] The pump has an outlet valve assembly (11) provided with an electrical, hydraulic or pneumatic exhaust actuator (16'), where a part (17') of the actuator is fixedly mounted at a housing head. Another part (18') of the actuator is coupled, driven and movable with an outlet valve body (15). The actuator is arranged opposite to the valve assembly, so that a direction of movement of the movable part of the actuator caused by the actuator opposite to a movement direction of the mounted part of the actuator coincides with a direction of movement of the outlet valve body caused by a gas flow. The actuator is designed as a solenoid integrated with a return spring, or a piezoelectric actuator such as piezo-bending actuator, or a magnetostrictive actuator.
IPC 8 full level
F01L 3/20 (2006.01); F01L 3/00 (2006.01); F01L 9/10 (2021.01); F01L 9/20 (2021.01); F01L 25/02 (2006.01); F04B 7/00 (2006.01); F04B 7/02 (2006.01); F04B 23/06 (2006.01); F04B 41/06 (2006.01); F04B 43/02 (2006.01); F04B 45/04 (2006.01)
CPC (source: EP US)
F01L 9/10 (2021.01 - EP); F01L 9/20 (2021.01 - EP); F04B 7/0076 (2013.01 - EP); F04B 7/0266 (2013.01 - EP US); F04B 23/06 (2013.01 - EP); F04B 41/06 (2013.01 - EP); F04B 43/02 (2013.01 - EP US); F04B 45/04 (2013.01 - EP US); F01L 3/205 (2013.01 - EP); F01L 25/02 (2013.01 - EP); F01L 2003/25 (2013.01 - EP)
Citation (examination)
JP 2001304114 A 20011031 - ULVAC CORP
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 2354546 A1 20110810; EP 2354546 B1 20190612; DE 202010002145 U1 20110907
DOCDB simple family (application)
EP 11000369 A 20110119; DE 202010002145 U 20100209