EP 2359386 A1 20110824 - INFRARED RADIATOR ARRANGEMENT FOR HIGH-TEMPERATURE VACUUM PROCESSES
Title (en)
INFRARED RADIATOR ARRANGEMENT FOR HIGH-TEMPERATURE VACUUM PROCESSES
Title (de)
INFRAROTSTRAHLER-ANORDNUNG FÜR HOCHTEMPERATUR-VAKUUMPROZESSE
Title (fr)
DISPOSITIF ÉMETTEUR À INFRAROUGE POUR TRAITEMENT SOUS VIDE À HAUTE TEMPÉRATURE
Publication
Application
Priority
- EP 2009008076 W 20091113
- DE 102008063677 A 20081219
Abstract (en)
[origin: WO2010069438A1] The invention relates to an infrared radiator, comprising at least one radiator tube (11) having pinches at each of its ends, wherein at least one opaque tube portion (12) is arranged in a manner welded on in alignment with the at least one radiator tube, and also to the use of an infrared radiator for installation in a process chamber (21).
IPC 8 full level
H01K 1/24 (2006.01); H01K 1/44 (2006.01); H01L 21/00 (2006.01); H05B 3/00 (2006.01); H05B 3/48 (2006.01)
CPC (source: EP KR US)
H01K 1/24 (2013.01 - EP US); H01K 1/58 (2013.01 - EP US); H01L 21/67115 (2013.01 - EP US); H05B 3/0038 (2013.01 - EP US); H05B 3/10 (2013.01 - KR); H05B 3/44 (2013.01 - EP US); H05B 3/48 (2013.01 - EP US)
Citation (search report)
See references of WO 2010069438A1
Citation (examination)
- KR 20080031314 A 20080408 - KYOCERA CORP [JP]
- US 2010006557 A1 20100114 - MARUYAMA TAKAHIRO [JP]
- JP 2005315447 A 20051110 - KYOCERA CORP
- JP S59138812 A 19840809 - NGK SPARK PLUG CO
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
WO 2010069438 A1 20100624; BR PI0923019 A2 20151215; CN 102257598 A 20111123; CN 102257598 B 20150520; DE 102008063677 A1 20100708; DE 102008063677 B4 20121004; EP 2359386 A1 20110824; KR 101285528 B1 20130717; KR 20110086710 A 20110729; US 2011248621 A1 20111013; US 8436523 B2 20130507
DOCDB simple family (application)
EP 2009008076 W 20091113; BR PI0923019 A 20091113; CN 200980151902 A 20091113; DE 102008063677 A 20081219; EP 09760728 A 20091113; KR 20117011334 A 20091113; US 200913140609 A 20091113