EP 2369034 A1 20110928 - Method for refilling a selenium evaporation chamber
Title (en)
Method for refilling a selenium evaporation chamber
Title (de)
Verfahren zum Nachfüllen einer Selenverdampferkammer
Title (fr)
Procédé de remplissage d'une chambre d'évaporateur de sélénium
Publication
Application
Priority
EP 10157914 A 20100326
Abstract (en)
The method for discontinuously refilling a selenium evaporator chamber, comprises introducing selenium (12) into an intermediate connection piece (10) via a feeder (6) by opening a cooled vacuum slide (8.1), which is heated at 25-35[deg] C, closing the cooled vacuum slide, applying a vacuum between the cooled vacuum slide, the intermediate connection piece and the heated vacuum slide (8.2), where the heated vacuum slide is heated at 150-170[deg] C, transferring the selenium into the selenium evaporator chamber by opening the heated vacuum slide, and closing the heated vacuum slide. The method for discontinuously refilling a selenium evaporator chamber, comprises introducing selenium (12) into an intermediate connection piece (10) via a feeder (6) by opening a cooled vacuum slide (8.1), which is heated at 25-35[deg] C, closing the cooled vacuum slide, applying a vacuum between the cooled vacuum slide, the intermediate connection piece and the heated vacuum slide (8.2), where the heated vacuum slide is heated at 150-170[deg] C, transferring the selenium into the selenium evaporator chamber by opening the heated vacuum slide, and closing the heated vacuum slide. The cooling of the cooled vacuum slide takes place by a mounted first cooled connection piece and/or a second cooled connection piece. The heating of the heated vacuum slide takes place by a mounted third connection piece and/or a first heated connection piece. An independent claim is included for a device for discontinuously refilling a selenium evaporator chamber.
Abstract (de)
Verfahren zum diskontinuierlichen Nachfüllen einer Selenverdampferkammer, wobei a. Selen (12) über eine Zuführung (6) durch Öffnen eines gekühlten Vakuumschiebers (8.1) in ein mittleres Verbindungsstück (10) eingeführt wird, wobei der gekühlte Vakuumschieber (8.1) auf 20 °C bis 45 °C temperiert wird, b. der gekühlte Vakuumschieber (8.1) geschlossen wird, c. ein Vakuums von 0,1 mbar bis 100 mbar zwischen dem gekühlten Vakuumschieber (8.1), dem mittleren Verbindungsstück (10) und einem geheizten Vakuumschieber (8.2) angelegt wird, wobei der geheizte Vakuumschieber (8.2) auf 130 °C bis 180 °C temperiert wird, d. das Selens (12) in eine Selenverdampferkammer (11) durch Öffnen des geheizten Vakuumschiebers (8.2) überführt wird und e. der geheizte Vakuumschieber (8.2) geschlossen wird.
IPC 8 full level
C23C 14/24 (2006.01)
CPC (source: EP)
C23C 14/246 (2013.01)
Citation (applicant)
- WO 2007077171 A2 20070712 - SULFURCELL SOLARTECHNIK GMBH [DE], et al
- EP 0715358 A2 19960605 - SIEMENS AG [DE]
- WO 2009034131 A2 20090319 - CENTROTHERM PHOTOVOLTAICS AG [DE], et al
- US 4880960 A 19891114 - REMONDIERE OLIVIER [FR], et al
- WO 2009010468 A1 20090122 - APPLIED MATERIALS INC [US], et al
Citation (search report)
- [AD] EP 2025773 A1 20090218 - APPLIED MATERIALS INC [US]
- [A] JP 2008248362 A 20081016 - FUJIFILM CORP
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
Designated extension state (EPC)
AL BA ME RS
DOCDB simple family (publication)
DOCDB simple family (application)
EP 10157914 A 20100326