EP 2377151 A1 20111019 - METHOD FOR LOWERING THE PRESSURE IN A CHARGE-DISCHARGE LOCK AND ASSOCIATED EQUIPMENT
Title (en)
METHOD FOR LOWERING THE PRESSURE IN A CHARGE-DISCHARGE LOCK AND ASSOCIATED EQUIPMENT
Title (de)
VERFAHREN ZUM HERABSETZEN DES DRUCKS IN EINER LADE-ENTLADE-VERRIEGELUNG UND DIESBEZÜGLICHE GERÄTE
Title (fr)
PROCEDE DE DESCENTE EN PRESSION DANS UN SAS DE CHARGEMENT ET DE DECHARGEMENT ET EQUIPEMENT ASSOCIE
Publication
Application
Priority
- FR 2009052607 W 20091218
- FR 0807191 A 20081219
Abstract (en)
[origin: WO2010070240A1] The invention relates to a method for lowering the pressure in a device charge-discharge lock from atmospheric pressure to a sub-atmospheric transfer pressure, said lock comprising a chamber in which at least one substrate is arranged at atmospheric pressure, said method comprising: a first step (101), in which first primary pumping is carried out from atmospheric pressure to a first characteristic threshold, using a primary pump with limited pumping rate, while isolating a turbomolecular pumping of said chamber; a second step (102) following said first step (101), in which a second primary pumping is carried out, faster than in said first step, to a second characteristic threshold, maintaining the isolation of the turbomolecular pumping; a third step (103) following said second step (102), in which secondary pumping is performed using said turbomolecular pumping upstream from the first pumping, and the primary pump chamber is isolated. The invention also relates to a device for implementing the method.
IPC 8 full level
H01L 21/677 (2006.01); C23C 14/00 (2006.01); H01L 21/00 (2006.01)
CPC (source: EP KR US)
F04D 19/04 (2013.01 - EP KR US); H01L 21/67109 (2013.01 - KR); H01L 21/67201 (2013.01 - EP KR US); Y10T 137/0396 (2015.04 - EP US); Y10T 137/86171 (2015.04 - EP US)
Citation (search report)
See references of WO 2010070240A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
WO 2010070240 A1 20100624; CN 102282663 A 20111214; EP 2377151 A1 20111019; FR 2940322 A1 20100625; FR 2940322 B1 20110211; JP 2012513111 A 20120607; KR 20110099041 A 20110905; US 2012024394 A1 20120202
DOCDB simple family (application)
FR 2009052607 W 20091218; CN 200980154661 A 20091218; EP 09805742 A 20091218; FR 0807191 A 20081219; JP 2011541570 A 20091218; KR 20117016652 A 20091218; US 200913140189 A 20091218