EP 2379272 A2 20111026 - METHOD AND DEVICE FOR SIMULTANEOUS MICROSTRUCTURING AND PASSIVATING
Title (en)
METHOD AND DEVICE FOR SIMULTANEOUS MICROSTRUCTURING AND PASSIVATING
Title (de)
VERFAHREN UND VORRICHTUNG ZUR SIMULTANEN MIKROSTRUKTURIERUNG UND PASSIVIERUNG
Title (fr)
PROCÉDÉ ET DISPOSITIF DE MICRO-STRUCTURATION ET PASSIVATION SIMULTANÉES
Publication
Application
Priority
- EP 2009009309 W 20091229
- DE 102009004902 A 20090116
Abstract (en)
[origin: WO2010081533A2] The invention relates to a method for simultaneously microstructuring and passivating siliceous solid bodies by means of a fluid jet-guided laser process. Local heating of the solid body surface occurs due to the laser, while a precursor for passivating the solid body surface is present in the fluid jet. The invention further relates to a device for simultaneously microstructuring and passivating. The method is used in particular in the production of solar cells.
IPC 8 full level
B23K 26/00 (2006.01); B23K 26/14 (2006.01); B23K 26/40 (2006.01)
CPC (source: EP KR)
B23K 26/0006 (2013.01 - EP KR); B23K 26/0622 (2015.10 - EP KR); B23K 26/144 (2015.10 - EP KR); B23K 26/146 (2015.10 - EP KR); B23K 26/352 (2015.10 - EP); B23K 26/354 (2015.10 - EP KR); B23K 26/40 (2013.01 - EP KR); C03C 17/22 (2013.01 - EP); C03C 17/225 (2013.01 - EP KR); C03C 17/25 (2013.01 - EP KR); C03C 23/0025 (2013.01 - EP KR); H01L 31/02167 (2013.01 - EP); H01L 31/02168 (2013.01 - EP KR); H01L 31/0236 (2013.01 - EP); H01L 31/02363 (2013.01 - EP KR); B23K 2101/40 (2018.07 - EP KR); B23K 2103/16 (2018.07 - EP KR); B23K 2103/50 (2018.07 - EP); B23K 2103/52 (2018.07 - EP KR); B23K 2103/56 (2018.07 - EP KR); C03C 2217/213 (2013.01 - EP KR); C03C 2217/281 (2013.01 - EP KR); C03C 2217/282 (2013.01 - EP KR); C03C 2218/112 (2013.01 - EP KR); Y02E 10/50 (2013.01 - EP KR)
Citation (search report)
See references of WO 2010081533A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
DE 102009004902 B3 20100512; CN 102281982 A 20111214; EP 2379272 A2 20111026; KR 20110117155 A 20111026; WO 2010081533 A2 20100722; WO 2010081533 A3 20100930
DOCDB simple family (application)
DE 102009004902 A 20090116; CN 200980154734 A 20091229; EP 09801176 A 20091229; EP 2009009309 W 20091229; KR 20117018922 A 20091229