EP 2387709 A1 20111123 - MICROSENSOR PRODUCED IN MICROSYSTEM TECHNOLOGIES FOR THE MEASUREMENT AND/OR DETECTION OF FOULING
Title (en)
MICROSENSOR PRODUCED IN MICROSYSTEM TECHNOLOGIES FOR THE MEASUREMENT AND/OR DETECTION OF FOULING
Title (de)
MITHILFE VON MIKROSYSTEM-TECHNOLOGIEN HERGESTELLTER MIKROSENSOR ZUR MESSUNG UND/ODER ERKENNUNG VON VERSCHMUTZUNGEN
Title (fr)
MICRO-CAPTEUR RÉALISÉ EN TECHNOLOGIES MICROSYSTÈMES POUR LA MESURE ET/OU LA DÉTECTION DE L'ENCRASSEMENT
Publication
Application
Priority
- FR 2010050080 W 20100119
- FR 0950314 A 20090119
Abstract (en)
[origin: WO2010082006A1] The invention relates to a sensor (10; 34) for the measurement and/or detection of fouling occuring directly or indirectly on what is called a front face of the sensor, characterized in that it comprises, in the form of a plurality of superposed layers: at least one heating element (14) capable of diffusing, on command, a controlled uniform heat flux with a thermal power of less than 200 mW; a thermal insulator (11) placed on the opposite side from the front face of the sensor, in order to prevent dissipation of the heat flux on said opposite side; at least one temperature measurement element (16), which is placed in the uniform heat flux diffused by said at least one heating element and offers a temperature measurement precision better than 0.1°C; a substrate (12; 42) on which the layers of said at least one heating element and at least one temperature measurement element are attached.
IPC 8 full level
G01N 17/00 (2006.01); G01N 25/18 (2006.01)
CPC (source: EP US)
G01N 17/008 (2013.01 - EP US); G01N 25/18 (2013.01 - EP US)
Citation (search report)
See references of WO 2010082006A1
Citation (examination)
- US 6238085 B1 20010529 - HIGASHI ROBERT E [US], et al
- EP 2382453 A1 20111102 - NEOSENS [FR]
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
WO 2010082006 A1 20100722; CN 102282454 A 20111214; CN 102282454 B 20140625; EP 2387709 A1 20111123; FR 2941300 A1 20100723; FR 2941300 B1 20160701; US 2011274138 A1 20111110; US 8746968 B2 20140610
DOCDB simple family (application)
FR 2010050080 W 20100119; CN 201080004802 A 20100119; EP 10707321 A 20100119; FR 0950314 A 20090119; US 201013144636 A 20100119