EP 2401414 A1 20120104 - SPUTTERED PIEZOELECTRIC MATERIAL
Title (en)
SPUTTERED PIEZOELECTRIC MATERIAL
Title (de)
PIEZOELEKTRISCHES SPUTTERMATERIAL
Title (fr)
MATÉRIAU PIÉZOÉLECTRIQUE PULVÉRISÉ
Publication
Application
Priority
- US 2010025012 W 20100223
- US 39364409 A 20090226
Abstract (en)
[origin: US2010213795A1] Piezoelectric actuators having a composition of Pb1.00+x(Zr0.52Ti0.48)1.00−yO3Nby, where x>−0.02 and y>0 are described. The piezoelectric material can have a Perovskite, which can enable good bending action when a bias is applied across the actuator.
IPC 8 full level
C23C 14/34 (2006.01); H01L 41/187 (2006.01); H01L 41/314 (2013.01)
CPC (source: EP KR US)
B41J 2/14233 (2013.01 - EP US); B41J 2/161 (2013.01 - EP US); B41J 2/1642 (2013.01 - EP US); B41J 2/1646 (2013.01 - EP US); C23C 14/34 (2013.01 - KR); H10N 30/076 (2023.02 - EP US); H10N 30/2047 (2023.02 - EP US); H10N 30/708 (2024.05 - EP); H10N 30/8554 (2023.02 - EP US); Y10T 29/42 (2015.01 - EP US)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
US 2010213795 A1 20100826; US 8164234 B2 20120424; CN 102333904 A 20120125; CN 102333904 B 20130807; EP 2401414 A1 20120104; EP 2401414 A4 20131009; EP 2401414 B1 20200603; JP 2012519378 A 20120823; KR 101312485 B1 20131001; KR 20110120342 A 20111103; US 2012177815 A1 20120712; WO 2010099091 A1 20100902
DOCDB simple family (application)
US 39364409 A 20090226; CN 201080009392 A 20100223; EP 10746695 A 20100223; JP 2011552079 A 20100223; KR 20117022188 A 20100223; US 2010025012 W 20100223; US 201213425003 A 20120320