EP 2403023 A4 20131127 - LIGHT EMITTING ELEMENT PRODUCING METHOD AND LIGHT EMITTING ELEMENT
Title (en)
LIGHT EMITTING ELEMENT PRODUCING METHOD AND LIGHT EMITTING ELEMENT
Title (de)
VERFAHREN ZUR HERSTELLUNG EINES LICHTEMITTIERENDEN ELEMENTS UND LICHTEMITTIERENDES ELEMENT
Title (fr)
PROCÉDÉ DE PRODUCTION D'UN ÉLÉMENT ÉLECTROLUMINESCENT ET ÉLÉMENT ÉLECTROLUMINESCENT
Publication
Application
Priority
- JP 2010051029 W 20100127
- JP 2009041159 A 20090224
Abstract (en)
[origin: US2011198566A1] A method for manufacturing a light emitting element is directed to a method for manufacturing a light emitting element of a III-V group compound semiconductor having a quantum well structure including In and N, including the steps of: forming a well layer including In and N; forming a barrier layer having a bandgap wider than a bandgap of the well layer; and supplying a gas including N and interrupting epitaxial growth after the step of forming the well layer and before the step of forming the barrier layer. In the step of interrupting epitaxial growth, the gas having decomposition efficiency higher than decomposition efficiency of decomposition from N2 and NH3 into active nitrogen at 900° C. is supplied. In addition, in the step of interrupting epitaxial growth, the gas different from a gas used as an N source of the well layer is supplied.
IPC 8 full level
H01L 33/32 (2010.01); H01L 21/205 (2006.01); H01L 33/06 (2010.01); H01S 5/343 (2006.01)
CPC (source: EP KR US)
B82Y 20/00 (2013.01 - EP US); H01L 21/0254 (2013.01 - EP US); H01L 21/0262 (2013.01 - EP US); H01L 33/0075 (2013.01 - EP US); H01L 33/04 (2013.01 - KR); H01L 33/32 (2013.01 - KR); H01L 33/06 (2013.01 - EP US); H01S 5/34333 (2013.01 - EP US); H01S 2304/04 (2013.01 - EP US)
Citation (search report)
- [XAYI] WO 2006035852 A2 20060406 - SUMITOMO CHEMICAL CO [JP], et al
- [YA] US 6017774 A 20000125 - YUASA TAKAYUKI [JP], et al
- [Y] JP 2008078186 A 20080403 - MITSUBISHI CHEM CORP
- See references of WO 2010098163A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
US 2011198566 A1 20110818; CN 102239574 A 20111109; EP 2403023 A1 20120104; EP 2403023 A4 20131127; JP 2010199236 A 20100909; KR 20110084296 A 20110721; TW 201036215 A 20101001; WO 2010098163 A1 20100902
DOCDB simple family (application)
US 201013124612 A 20100127; CN 201080003506 A 20100127; EP 10746044 A 20100127; JP 2009041159 A 20090224; JP 2010051029 W 20100127; KR 20117013023 A 20100127; TW 99103040 A 20100202