EP 2406196 A1 20120118 - THIN FILM DEPOSITION METHOD
Title (en)
THIN FILM DEPOSITION METHOD
Title (de)
DÜNNSCHICHTABLAGERUNGSVERFAHREN
Title (fr)
PROCÉDÉ DE DÉPÔT DE COUCHE MINCE
Publication
Application
Priority
- FR 2010050409 W 20100310
- FR 0951525 A 20090311
Abstract (en)
[origin: WO2010103237A1] The invention relates to a method for flame heat treating at least one thin film deposited onto a glass substrate (1) moving in line with a flame treatment device that includes at least one burner (2), said treatment being suitable for increasing the crystallization rate of said at least one thin film and/or increasing the size of the crystallites in said at least one thin film, said method being characterized in that the maximum transient bending "b" is less than 150 mm and adheres to the following condition: b = 0.9 xd where the bending "b" corresponds to the distance, expressed in mm, between the unheated substrate plane (P1) and the substrate point closest to the plane (P2) passing through the nozzle (6) of the burner (2) and parallel to the unheated substrate plane (P1), and "d" corresponds to the distance, expressed in mm, between the unheated substrate plane (P1) and the nozzle (6) of the burner (2), the substrate width "L" in a direction perpendicular to the moving direction (5) being greater than or equal to 1.1 meters.
IPC 8 full level
C03C 17/00 (2006.01); C23C 14/08 (2006.01); C23C 14/58 (2006.01)
CPC (source: EP US)
C03C 17/002 (2013.01 - EP US); C23C 14/5806 (2013.01 - EP US); C03C 2218/156 (2013.01 - EP US); C03C 2218/32 (2013.01 - EP US); C03C 2218/345 (2013.01 - EP US)
Citation (search report)
See references of WO 2010103237A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
WO 2010103237 A1 20100916; CN 102348659 A 20120208; CN 102348659 B 20141105; EP 2406196 A1 20120118; FR 2943050 A1 20100917; JP 2012520229 A 20120906; JP 5711159 B2 20150430; US 2011311732 A1 20111222; US 8815340 B2 20140826
DOCDB simple family (application)
FR 2010050409 W 20100310; CN 201080011627 A 20100310; EP 10715315 A 20100310; FR 0951525 A 20090311; JP 2011553495 A 20100310; US 201013148826 A 20100310