EP 2409165 A1 20120125 - SCANNING FORCE MICROSCOPE
Title (en)
SCANNING FORCE MICROSCOPE
Title (de)
RASTERKRAFTMIKROSKOP
Title (fr)
MICROSCOPE À FORCE ATOMIQUE À BALAYAGE
Publication
Application
Priority
DE 2009000382 W 20090316
Abstract (en)
[origin: WO2010105584A1] The invention relates to a scanning force microscope, which can be used for different examinations of the surfaces of samples. The aim of the invention is to provide a scanning force microscope, by which surface regions of samples can be detected, which are oriented at a steeply inclined angle with respect to the central longitudinal axis of a cantilever of the scanning force microscope. In the scanning force microscope according to the invention, at least one sensor tip is disposed on the cantilever, the sensitive region of which is disposed at a distance from the cantilever. To this end, the cantilever which is held on a face and can be prompted to oscillate using at least one actuator can be moved with the sensor tip and sample relative to each other along at least one axis. The sensitive region of a sensor tip and/or the base of a sensor tip are disposed on the cantilever with a distance and next to the center longitudinal axis of the cantilever. Either alone or additionally, the sensor tip can be angled or curved at an angle of < 90º with respect to the center longitudinal axis of the cantilever.
IPC 8 full level
G01Q 60/38 (2010.01)
CPC (source: EP)
G01Q 60/38 (2013.01); G01Q 70/10 (2013.01)
Citation (search report)
See references of WO 2010105584A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR
DOCDB simple family (publication)
DOCDB simple family (application)
DE 2009000382 W 20090316; EP 09775848 A 20090316