EP 2412008 A1 20120201 - METHOD FOR PRODUCING SOLAR CELLS HAVING SELECTIVE EMITTER
Title (en)
METHOD FOR PRODUCING SOLAR CELLS HAVING SELECTIVE EMITTER
Title (de)
VERFAHREN ZUR HERSTELLUNG VON SOLARZELLEN MIT SELEKTIVEM EMITTER
Title (fr)
PROCÉDÉ DE FABRICATION DE CELLULES SOLAIRES À ÉMETTEUR SÉLECTIF
Publication
Application
Priority
- EP 2010053985 W 20100326
- DE 102009015367 A 20090327
- DE 102009041546 A 20090915
Abstract (en)
[origin: WO2010115730A1] The invention relates to a method for producing solar cells having a selective emitter. Wafers (1) having no saw damage are first provided. A full-surface application of a doping source (2) to the wafer and a light, first inward diffusion of the dopant are then carried out until a first film resistor region is obtained. The applied doping source is then structured, wherein only those regions (4) remain as a result of the structuring that substantially correspond to the sections on the wafer to be contacted later. Another, second diffusion from the remaining regions of the doping source into the wafer volume is then carried out until a second film resistor region for the selective emitter (4) and a simultaneous redistribution of the dopant (5) introduced during the first diffusion are obtained, having the goal of lowering the dopant concentration in the region near the surface that is no longer covered by the doping source, under the condition that the film resistor values of the first film resistor region are larger than those of the second film resistor region.
IPC 8 full level
H01L 21/225 (2006.01); H01L 31/068 (2012.01); H01L 31/18 (2006.01)
CPC (source: EP US)
H01L 21/2255 (2013.01 - EP US); H01L 31/068 (2013.01 - EP US); H01L 31/1804 (2013.01 - EP US); Y02E 10/547 (2013.01 - EP US); Y02P 70/50 (2015.11 - EP US)
Citation (search report)
See references of WO 2010115730A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
DE 102009041546 A1 20101014; CN 102449738 A 20120509; CN 102449738 B 20150902; EP 2412008 A1 20120201; US 2012167968 A1 20120705; WO 2010115730 A1 20101014
DOCDB simple family (application)
DE 102009041546 A 20090915; CN 201080023029 A 20100326; EP 10711215 A 20100326; EP 2010053985 W 20100326; US 201013259835 A 20100326