EP 2414275 A2 20120208 - MEMS CAVITY-COATING LAYERS AND METHODS
Title (en)
MEMS CAVITY-COATING LAYERS AND METHODS
Title (de)
SCHICHTEN UND VERFAHREN ZUR BESCHICHTUNG VON MEMS-KAVITÄTEN
Title (fr)
COUCHES ET PROCÉDÉS DE REVÊTEMENT DE CAVITÉ MEMS
Publication
Application
Priority
- US 2008056310 W 20080307
- US 68943007 A 20070321
Abstract (en)
[origin: WO2008115716A2] Devices, methods, and systems comprising a MEMS device, for example, an interferometric modulator, that comprises a cavity in which a layer coats multiple surfaces. The layer is conformal or non-conformal. In some embodiments, the layer is formed by atomic layer deposition (ALD). Preferably, the layer comprises a dielectric material. In some embodiments, the MEMS device also exhibits improved characteristics, such as improved electrical insulation between moving electrodes, reduced stiction, and/or improved mechanical properties.
IPC 8 full level
CPC (source: EP KR US)
B81B 3/0008 (2013.01 - EP US); B81B 7/00 (2013.01 - KR); B81C 1/00 (2013.01 - KR); G02B 26/001 (2013.01 - EP US); B81B 2201/047 (2013.01 - EP US)
Citation (search report)
See references of WO 2008115716A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2008115716 A2 20080925; WO 2008115716 A3 20090409; CN 101636344 A 20100127; CN 101636344 B 20130821; EP 2414275 A2 20120208; JP 2010524010 A 20100715; JP 5307734 B2 20131002; KR 20100015686 A 20100212; TW 200848360 A 20081216; TW I462869 B 20141201; US 2008231931 A1 20080925; US 2010245979 A1 20100930; US 2012206462 A1 20120816; US 7733552 B2 20100608; US 8164815 B2 20120424
DOCDB simple family (application)
US 2008056310 W 20080307; CN 200880008750 A 20080307; EP 08714218 A 20080307; JP 2009554632 A 20080307; KR 20097021764 A 20080307; TW 97109935 A 20080320; US 201213453844 A 20120423; US 68943007 A 20070321; US 79529410 A 20100607