EP 2422363 A1 20120229 - METHOD AND DEVICE FOR INTRODUCING AND REMOVING SUBSTRATES
Title (en)
METHOD AND DEVICE FOR INTRODUCING AND REMOVING SUBSTRATES
Title (de)
VERFAHREN UND VORRICHTUNG ZUM EIN- UND AUSSCHLEUSEN VON SUBSTRATEN
Title (fr)
PROCÉDÉ ET DISPOSITIF POUR L'INTRODUCTION ET L'ÉVACUATION DE SUBSTRATS
Publication
Application
Priority
- EP 2010055455 W 20100423
- DE 102009018777 A 20090424
- DE 102009037291 A 20090812
Abstract (en)
[origin: WO2010122153A1] The invention relates to a method and a device for introducing and removing substrates. Substrates (5) are transported into a lock (2) by a transport device (4). A collection container (3) is located in said lock below the substrates (5) for collecting possible substrate fragments (19). The substrates (5) are removed together with the collection container (3) and the lock cover (18) once the lock (2) has been flooded, the lock cover (18) and the collection container (3) forming an almost closed box around the substrates (5). Once the substrates (5) are replaced and the collection container (3) is evacuated, the new substrates (5) are introduced together with the collection container. All the steps are carried out in the machine cycle to ensure an effective production process.
IPC 8 full level
H01L 21/677 (2006.01); H01L 21/00 (2006.01); H01L 21/687 (2006.01)
CPC (source: EP US)
H01L 21/67126 (2013.01 - EP US); H01L 21/6719 (2013.01 - EP US); H01L 21/67201 (2013.01 - EP US); H01L 21/67751 (2013.01 - EP US)
Citation (search report)
See references of WO 2010122153A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
WO 2010122153 A1 20101028; DE 102009037291 A1 20101111; DE 102009037291 B4 20200610; EP 2422363 A1 20120229; US 2012027543 A1 20120202; US 8740536 B2 20140603
DOCDB simple family (application)
EP 2010055455 W 20100423; DE 102009037291 A 20090812; EP 10720560 A 20100423; US 201013138713 A 20100423