EP 2425444 A1 20120307 - CHARGED PARTICLE OPTICAL SYSTEM COMPRISING AN ELECTROSTATIC DEFLECTOR
Title (en)
CHARGED PARTICLE OPTICAL SYSTEM COMPRISING AN ELECTROSTATIC DEFLECTOR
Title (de)
EINEN ELEKTROSTATISCHEN DEFLEKTOR UMFASSENDES OPTISCHES SYSTEM MIT GELADENEN TEILCHEN
Title (fr)
SYSTÈME OPTIQUE À PARTICULES CHARGÉES COMPRENANT UN DÉFLECTEUR ÉLECTROSTATIQUE
Publication
Application
Priority
- IB 2010051848 W 20100428
- NL 1036912 A 20090429
- US 17363809 P 20090429
Abstract (en)
[origin: WO2010125526A1] A charged particle optical system comprising an electrostatic deflector for the deflection of a plurality of beamlets of charged particles which electrostatic deflector comprises a first and a second electrode which are at least partially freestanding, said deflector deflecting the said plurality of beamlets by operation of an electric field between the electrodes between which the said plurality of beamlets passes, the said plurality of beamlets defining a passing window, said passing window extending in a first direction, wherein said plurality of beamlets is arranged in a single row extending in said first direction and a dimension of said passing window in a direction transverse to said first direction matching a diameter of said beamlets and wherein a substantial part of the electrostatic deflector extends beyond the passing window in said first direction.
IPC 8 full level
H01J 37/317 (2006.01)
CPC (source: EP KR)
B82Y 10/00 (2013.01 - EP); B82Y 40/00 (2013.01 - EP); H01J 37/10 (2013.01 - KR); H01J 37/147 (2013.01 - KR); H01J 37/22 (2013.01 - KR); H01J 37/317 (2013.01 - KR); H01J 37/3177 (2013.01 - EP)
Citation (search report)
See references of WO 2010125526A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
WO 2010125526 A1 20101104; CN 102460630 A 20120516; CN 102460630 B 20150107; EP 2425444 A1 20120307; JP 2012525698 A 20121022; JP 5607145 B2 20141015; KR 101557626 B1 20151006; KR 20120035151 A 20120413; NL 1036912 C2 20101101
DOCDB simple family (application)
IB 2010051848 W 20100428; CN 201080029268 A 20100428; EP 10719962 A 20100428; JP 2012507872 A 20100428; KR 20117028573 A 20100428; NL 1036912 A 20090429