EP 2435227 A1 20120404 - DEVICE AND METHOD FOR STACKING OR TRANSPORTING A PLURALITY OF FLAT SUBSTRATES
Title (en)
DEVICE AND METHOD FOR STACKING OR TRANSPORTING A PLURALITY OF FLAT SUBSTRATES
Title (de)
VORRICHTUNG UND VERFAHREN ZUM STAPELN BZW. TRANSPORT EINER VIELZAHL VON FLACHEN SUBSTRATEN
Title (fr)
DISPOSITIF ET PROCÉDÉ D'EMPILEMENT OU DE TRANSPORT DE PLUSIEURS SUBSTRATS PLATS
Publication
Application
Priority
- EP 2010057428 W 20100528
- DE 102009024239 A 20090529
Abstract (en)
[origin: WO2010136568A1] The invention relates to a device for stacking a plurality of silicon wafers, comprising an upright machine carrier for accommodating a plurality of the silicon wafers, wherein the silicon wafers are provided in the machine carrier in a horizontal position. The device comprises three identical loading cassettes for introducing some silicon wafers therein. The machine carrier also comprises accommodating devices for the loading cassettes, wherein a loading cassette comprises a lower supporting surface on which the silicon wafers can be stacked and a rear side extending substantially perpendicularly thereto. The loading cassette is designed in such a way that the side opposite the rear side and the top side are freely accessible.
IPC 8 full level
B28D 5/00 (2006.01); B65G 59/02 (2006.01); H01L 21/673 (2006.01); H01L 21/677 (2006.01)
CPC (source: EP KR US)
B28D 5/0082 (2013.01 - KR); B65G 59/023 (2013.01 - KR); B65G 59/04 (2013.01 - EP US); B65G 59/045 (2013.01 - EP US); H01L 21/67303 (2013.01 - EP KR US); H01L 21/67763 (2013.01 - KR); H01L 21/67766 (2013.01 - KR); H01L 21/67778 (2013.01 - KR); H01L 21/67781 (2013.01 - EP US); H01L 21/68771 (2013.01 - KR); B65G 2201/0297 (2013.01 - EP US)
Citation (search report)
See references of WO 2010136568A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
DE 102009024239 A1 20101202; CN 102596522 A 20120718; EP 2435227 A1 20120404; JP 2012528479 A 20121112; KR 20120025556 A 20120315; MX 2011012709 A 20120619; SG 176218 A1 20111229; TW 201108347 A 20110301; US 2012082538 A1 20120405; US 8337134 B2 20121225; WO 2010136568 A1 20101202
DOCDB simple family (application)
DE 102009024239 A 20090529; CN 201080033784 A 20100528; EP 10721807 A 20100528; EP 2010057428 W 20100528; JP 2012512392 A 20100528; KR 20117031240 A 20100528; MX 2011012709 A 20100528; SG 2011086824 A 20100528; TW 99117277 A 20100528; US 201113305198 A 20111128