EP 2435789 A1 20120404 - MEMS MASS SPRING DAMPER SYSTEMS USING AN OUT-OF-PLANE SUSPENSION SCHEME
Title (en)
MEMS MASS SPRING DAMPER SYSTEMS USING AN OUT-OF-PLANE SUSPENSION SCHEME
Title (de)
MEMS-MASSE-FEDER-DÄMPFERSYSTEME MIT FEDERUNGSSCHEMA AUSSERHALB DER EBENE
Title (fr)
SYSTÈME MASSE-RESSORT-AMORTISSEUR DE SYSTÈME MICROÉLECTROMÉCANIQUE (MEMS) UTILISANT UN SCHÉMA DE SUSPENSION HORS-PLAN
Publication
Application
Priority
- US 2010036406 W 20100527
- US 18156509 P 20090527
Abstract (en)
[origin: WO2010138717A1] MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) using an out-of-plane (or vertical) suspension scheme, wherein the suspensions are normal to the proof mass, are disclosed. Such out-of-plane suspension scheme helps such MEMS mass-spring-damper systems achieve inertial grade performance. Methods of fabricating out-of-plane suspensions in MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) are also disclosed.
IPC 8 full level
G01C 19/5719 (2012.01); B81B 3/00 (2006.01); G01P 15/08 (2006.01); G01P 15/125 (2006.01); G01P 15/18 (2013.01)
CPC (source: EP US)
B81B 3/0062 (2013.01 - EP US); G01C 19/5719 (2013.01 - EP US); G01P 15/08 (2013.01 - EP US); G01P 15/0802 (2013.01 - EP US); G01P 15/125 (2013.01 - EP US); G01P 15/18 (2013.01 - EP US); B81B 2201/0242 (2013.01 - EP US); G01P 2015/082 (2013.01 - EP US)
Citation (search report)
See references of WO 2010138717A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
WO 2010138717 A1 20101202; EP 2435789 A1 20120404; EP 2435789 B1 20150408; JP 2012528335 A 20121112; US 2011030472 A1 20110210; US 2015285633 A1 20151008; US 2018023952 A1 20180125; US 8640541 B2 20140204; US 9791274 B2 20171017
DOCDB simple family (application)
US 2010036406 W 20100527; EP 10732533 A 20100527; JP 2012513255 A 20100527; US 201414171691 A 20140203; US 201715720160 A 20170929; US 78905110 A 20100527