EP 2438767 A1 20120411 - COMPONENT WITH A MICROMECHANICAL MICROPHONE STRUCTURE AND METHOD FOR PRODUCTION SUCH A COMPONENT
Title (en)
COMPONENT WITH A MICROMECHANICAL MICROPHONE STRUCTURE AND METHOD FOR PRODUCTION SUCH A COMPONENT
Title (de)
BAUELEMENT MIT EINER MIKROMECHANISCHEN MIKROFONSTRUKTUR UND VERFAHREN ZU DESSEN HERSTELLUNG
Title (fr)
ÉLÉMENT AVEC UNE STRUCTURE DE MICROPHONE MICROMÉCHANIQUE ET PROCÉDÉ POUR PRODUIRE UN TEL ÉLÉMENT
Publication
Application
Priority
- EP 2010054583 W 20100407
- DE 102009026682 A 20090603
Abstract (en)
[origin: WO2010139498A1] A component having a stable but acoustically sensitive microphone structure, and a simple and cost-effective method for producing same is provided. Said microphone component comprises an acoustically active membrane (11), which functions as a deflectable electrode of a microphone capacitor, a stationary acoustically permeable counter element (12), which functions as a counter electrode of the microphone capacitor, and means for detecting and evaluating the capacity changes of the microphone capacitor. The membrane (11) is realized in a membrane layer (3) above the semi-conductor substrate (1) of the component and spans over a sound opening (13) in the back side of the substrate. The counter element (12) is configured in a further layer (5) above the membrane (11). According to the invention, said further layer (5) substantially extends across the entire component surface and balances level differences, so that the entire component surface is mostly even in compliance with said further layer (5). Therefore, a foil can be applied to the layer designs of the microphone structures exposed in the wafer assembly, which allows for singularization of the components of the invention in a standard sawing process.
IPC 8 full level
H04R 19/00 (2006.01); B81C 1/00 (2006.01)
CPC (source: EP US)
H04R 19/005 (2013.01 - EP US); Y10T 428/31663 (2015.04 - EP US)
Citation (search report)
See references of WO 2010139498A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
DE 102009026682 A1 20101209; DE 102009026682 A9 20130103; EP 2438767 A1 20120411; EP 2438767 B1 20130130; JP 2012529207 A 20121115; JP 2014090514 A 20140515; US 2012091544 A1 20120419; US 8637945 B2 20140128; WO 2010139498 A1 20101209
DOCDB simple family (application)
DE 102009026682 A 20090603; EP 10715187 A 20100407; EP 2010054583 W 20100407; JP 2012513519 A 20100407; JP 2014019784 A 20140204; US 201013259570 A 20100407