EP 2438801 A1 20120411 - PLASMA GENERATION DEVICE WITH ELECTRON CYCLOTRON RESONANCE
Title (en)
PLASMA GENERATION DEVICE WITH ELECTRON CYCLOTRON RESONANCE
Title (de)
PLASMAERZEUGUNGSVORRICHTUNG MIT ELEKTRON-ZYKLOTRON-RESONANZ
Title (fr)
DISPOSITIF DE GÉNÉRATION DE PLASMAS À LA RÉSONANCE CYCLOTRON ÉLECTRONIQUE
Publication
Application
Priority
- EP 2010057838 W 20100604
- FR 0953740 A 20090605
Abstract (en)
[origin: WO2010139788A1] The present invention relates to a plasma-generation device (600) with electron cyclotron resonance, comprising two adjacent sealed vacuum chambers (601, 602) intended for containing plasmas, a means (15) for injecting a high-frequency wave into said chambers, a magnetic structure for generating a magnetic field in the chambers comprising a plurality of parallelepipedal permanent magnets (610, 611, 612, 613, 614, 615, 616, 617, 618, 619, 620, 621) and generating at least two plasmas according to the magnetic field lines, said module of said magnetic field having a magnetic mirror configuration with at least one electron cyclotron resonance area per plasma, said magnetic structure comprising at least one permanent magnet (614, 615, 616, 617) contributing to the formation of a plasma in each one of the chambers, such that said chambers share the same at least one permanent magnet (614, 615, 616, 617) on the common wall thereof.
IPC 8 full level
H05H 1/46 (2006.01); H01J 37/32 (2006.01)
CPC (source: EP US)
H01J 37/32678 (2013.01 - EP US); H05H 1/46 (2013.01 - EP US); Y02E 60/36 (2013.01 - EP US)
Citation (search report)
See references of WO 2010139788A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
WO 2010139788 A1 20101209; EP 2438801 A1 20120411; FR 2946490 A1 20101210; FR 2946490 B1 20110715; US 2012160168 A1 20120628
DOCDB simple family (application)
EP 2010057838 W 20100604; EP 10724769 A 20100604; FR 0953740 A 20090605; US 201013375974 A 20100604