EP 2447754 A1 20120502 - Optical measuring apparatuses
Title (en)
Optical measuring apparatuses
Title (de)
Optische Messvorrichtungen
Title (fr)
Appareils de mesure optique
Publication
Application
Priority
KR 20100105450 A 20101027
Abstract (en)
An optical measuring apparatus may include a light source, linear polarizer, polarized beam splitter, quarter wave plate, objective lens, and/or light receiver. The polarized beam splitter may be configured to transmit linearly polarized light from the linear polarizer to any one of a first and second optical path. The quarter wave plate may be configured to circularly polarize light transmitted through the first optical path from the polarized beam splitter and transmit the circularly polarized light to an object to be measured, and the quarter wave plate may be configured to linearly polarize the circularly polarized light reflected from the object to be measured and transmit the linearly polarized reflected light to the second optical path of the polarized beam splitter. The objective lens may be configured to generate light having different wavelengths by generating chromatic aberration in the circularly polarized light from the quarter wave plate.
IPC 8 full level
G02B 21/00 (2006.01); G01B 11/02 (2006.01)
CPC (source: EP KR US)
G01B 11/026 (2013.01 - EP KR US); G01B 11/06 (2013.01 - EP KR US); G01B 11/24 (2013.01 - EP KR US); G02B 21/0064 (2013.01 - EP KR US)
Citation (search report)
- [XI] WO 2009048808 A1 20090416 - 3M INNOVATIVE PROPERTIES CO [US], et al
- [X] FR 2930334 A1 20091023 - NANOTEC SOLUTION SOC CIV ILE [FR]
- [XI] KR 20100018984 A 20100218 - NANOSCOPESYSTEMS INC [KR]
- [Y] US 2010188742 A1 20100729 - CHEN LIANG-CHIA [TW], et al
- [Y] US 4634880 A 19870106 - LINDOW JAMES T [US], et al
- [Y] RUPRECHT A K ET AL: "CHROMATIC CONFOCAL DETECTION FOR HIGH-SPEED MICROTOPOGRAPHY MEASUREMENTS", PROCEEDINGS OF SPIE, SPIE, US, vol. 5302, no. 1, 1 January 2003 (2003-01-01), pages 53 - 60, XP009084987, ISSN: 0277-786X, DOI: 10.1117/12.525658
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
EP 2447754 A1 20120502; KR 101819006 B1 20180117; KR 20120044064 A 20120507; US 2012105859 A1 20120503; US 8736839 B2 20140527
DOCDB simple family (application)
EP 11186642 A 20111026; KR 20100105450 A 20101027; US 201113281656 A 20111026