EP 2450936 B1 20130313 - Microscope system, method for operating a charged-particle microscope
Title (en)
Microscope system, method for operating a charged-particle microscope
Title (de)
Mikroskopsystem, Verfahren zum Betreiben eines Ladungsträger-Mikroskops
Title (fr)
Système de microscope, procédé de fonctionnement d'un microscope à particules chargées
Publication
Application
Priority
EP 10014245 A 20101103
Abstract (en)
[origin: EP2450936A1] A method of operating a charged-particle microscope, the method comprising: recording a first image of a first region of an object using the charged-particle microscope in a first setting; recording a second image of a second region of the object using the charged-particle microscope in a second setting, wherein the second setting differs from the first setting with respect to at least one of a kinetic energy of primary charged particles used for imaging, a detector setting used for imaging, a beam current of the primary charged particles used for imaging and a pressure in a measuring chamber of the charged-particle microscope; reading a third image of a third region of the object using the charged-particle microscope, wherein the first and second regions are contained at least partially within the third region; displaying at least a portion of the third image; displaying a representation of the first image at least partly within the displayed third image, wherein the representation of the first image includes a first indicator which is indicative of the first setting; displaying a representation of the second image at least partly within the displayed third image, wherein the representation of the second image includes a second indicator which is indicative of the second setting, and wherein the displayed second indicator is different from the displayed first indicator.
IPC 8 full level
H01J 37/22 (2006.01); G02B 21/36 (2006.01); H01J 37/244 (2006.01); H01J 37/26 (2006.01)
CPC (source: EP US)
G02B 21/367 (2013.01 - EP US); H01J 37/222 (2013.01 - EP US); H01J 37/244 (2013.01 - EP US); H01J 37/26 (2013.01 - EP US); H01J 2237/047 (2013.01 - EP US); H01J 2237/22 (2013.01 - EP US); H01J 2237/221 (2013.01 - EP US); H01J 2237/225 (2013.01 - EP US); H01J 2237/2482 (2013.01 - EP US); H01J 2237/28 (2013.01 - EP US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 2450936 A1 20120509; EP 2450936 B1 20130313; CN 102543638 A 20120704; CN 102543638 B 20160309; JP 2012099481 A 20120524; JP 4942853 B2 20120530; US 2012104250 A1 20120503; US 8426812 B2 20130423
DOCDB simple family (application)
EP 10014245 A 20101103; CN 201110462520 A 20111103; JP 2011240527 A 20111101; US 201113287927 A 20111102