EP 2452173 A1 20120516 - PRESSURE SENSOR HAVING AN INTERFEROMETRIC CONVERTER AND PRESSURE MEASURING DEVICE HAVING SUCH A PRESSURE SENSOR
Title (en)
PRESSURE SENSOR HAVING AN INTERFEROMETRIC CONVERTER AND PRESSURE MEASURING DEVICE HAVING SUCH A PRESSURE SENSOR
Title (de)
DRUCKSENSOR MIT INTERFEROMETRISCHEM WANDLER UND DRUCKMESSGERÄT MIT EINEM SOLCHEN DRUCKSENSOR
Title (fr)
CAPTEUR DE PRESSION AVEC CONVERTISSEUR INTERFÉROMÉTRIQUE, ET APPAREIL DE MESURE DE LA PRESSION COMPORTANT UN TEL CAPTEUR DE PRESSION
Publication
Application
Priority
- EP 2010058780 W 20100622
- DE 102009027592 A 20090709
Abstract (en)
[origin: WO2011003730A1] The invention related to a pressure sensor (1) comprising a ceramic main body (2), a measuring membrane (3), which contains Al2O3 and is joined to the main body along a peripheral joint (4) in a pressure-tight manner, at least one sensor interferometer, wherein the at least one sensor interferometer comprises at least one first reflection surface (5, 6) and a second reflection surface (6, 7) for creating a measurement variable-dependent path difference between the first and the second reflection surfaces. The measuring membrane (3) comprises at least one of the reflection surfaces (5, 6, 7), at least one light path (9), through which light can pass through the main body (2) to the first and second reflection surfaces and which runs substantially perpendicular to the first and the second reflection surfaces and perpendicular to the plane of the measuring membrane.
IPC 8 full level
CPC (source: EP)
G01L 7/086 (2013.01); G01L 9/0079 (2013.01)
Citation (search report)
See references of WO 2011003730A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
WO 2011003730 A1 20110113; DE 102009027592 A1 20110512; EP 2452173 A1 20120516
DOCDB simple family (application)
EP 2010058780 W 20100622; DE 102009027592 A 20090709; EP 10727397 A 20100622