EP 2452174 A1 20120516 - DEVICE FOR MEASURING PRESSURE, AND METHOD FOR MANUFACTURING SAME
Title (en)
DEVICE FOR MEASURING PRESSURE, AND METHOD FOR MANUFACTURING SAME
Title (de)
VORRICHTUNG ZUR DRUCKMESSUNG UND HERSTELLUNGSVERFAHREN DAFÜR
Title (fr)
DISPOSITIF DE MESURE DE PRESSION ET SON PROCÉDÉ DE FABRICATION
Publication
Application
Priority
- FR 2010051415 W 20100705
- FR 0954667 A 20090706
- US 22458109 P 20090710
Abstract (en)
[origin: WO2011004113A1] The invention relates to a device for measuring pressure through the capacitive effect between two electrodes, including at least one sensitive electrode (11) spaced apart from and opposite a stationary electrode (211) so as to define a cavity (4) in which a reference pressure (Pref) exists. The device according to the invention further includes a protective housing (1) for insulating at least the stationary electrode from the ambient environment in which the pressure (P) to be measured exists, said housing (1) having at least one solid portion, forming a recess (10) for containing at least the stationary electrode (211), and a thinned portion forming the sensitive electrode (11).
IPC 8 full level
G01L 9/00 (2006.01)
CPC (source: EP US)
G01L 9/0072 (2013.01 - EP US); G01L 9/0073 (2013.01 - EP US)
Citation (search report)
See references of WO 2011004113A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
FR 2947629 A1 20110107; FR 2947629 B1 20120330; EP 2452174 A1 20120516; IL 217358 A0 20120229; US 2012096944 A1 20120426; WO 2011004113 A1 20110113
DOCDB simple family (application)
FR 0954667 A 20090706; EP 10742200 A 20100705; FR 2010051415 W 20100705; IL 21735812 A 20120104; US 201013379399 A 20100705