EP 2457263 A2 20120530 - METHOD AND DEVICE FOR CLEANING SUBSTRATES ON A CARRIER
Title (en)
METHOD AND DEVICE FOR CLEANING SUBSTRATES ON A CARRIER
Title (de)
VERFAHREN UND VORRICHTUNG ZUR REINIGUNG VON SUBSTRATEN AN EINEM TRÄGER
Title (fr)
PROCÉDÉ ET DISPOSITIF POUR NETTOYER DES SUBSTRATS SUR UN SUPPORT
Publication
Application
Priority
- DE 102009035343 A 20090723
- EP 2010060644 W 20100722
Abstract (en)
[origin: WO2011009917A2] The invention relates to a device and a method for cleaning substrates on a carrier. The substrates are fixed to the bottom side of the carrier in such a way that they are arranged in parallel at a short distance from each other, said carrier comprising, on the inside thereof, a plurality of longitudinal channels extending in parallel. As the wafers are sawn, the channels merge with the openings in intermediate spaces between the substrates. A relative movement enables a long tube, from which cleaning fluid is dispensed, to be introduced into one of the longitudinal channels, the relative movement being generated essentially by moving the carrier.
IPC 8 full level
H01L 31/18 (2006.01)
CPC (source: EP KR US)
B28D 5/0076 (2013.01 - EP KR US); B28D 5/0082 (2013.01 - EP KR US); H01L 21/67051 (2013.01 - EP KR US); H01L 21/67313 (2013.01 - EP KR US); H01L 31/04 (2013.01 - KR); H01L 31/18 (2013.01 - EP KR US); Y02E 10/50 (2013.01 - EP)
Citation (search report)
See references of WO 2011009917A2
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
DE 102009035343 A1 20110127; CN 102612759 A 20120725; CN 102612759 B 20150311; EP 2457263 A2 20120530; JP 2012533898 A 20121227; KR 20120036348 A 20120417; MY 154124 A 20150515; TW 201117274 A 20110516; TW I493607 B 20150721; US 2012118329 A1 20120517; US 8524008 B2 20130903; WO 2011009917 A2 20110127; WO 2011009917 A3 20110519
DOCDB simple family (application)
DE 102009035343 A 20090723; CN 201080034667 A 20100722; EP 10739325 A 20100722; EP 2010060644 W 20100722; JP 2012521040 A 20100722; KR 20127001541 A 20100722; MY PI2012000240 A 20100722; TW 99124188 A 20100722; US 201213355223 A 20120120