Global Patent Index - EP 2458037 A1

EP 2458037 A1 20120530 - A method for precisely controlled masked anodization

Title (en)

A method for precisely controlled masked anodization

Title (de)

Verfahren zur präzise gesteuerten maskierten Anodisierung

Title (fr)

Procédé pour anodisation de masque contrôlée avec précision

Publication

EP 2458037 A1 20120530 (EN)

Application

EP 11162495 A 20110414

Priority

US 41819410 P 20101130

Abstract (en)

The present invention is related to a method for masked anodization of an anodizable layer on a substrate, for example an aluminium layer present on a sacrificial layer, wherein the sacrificial layer needs to be removed from a cavity comprising a Micro or Nano Electromechanical System (MEMS or NEMS). Anodization of an Al layer leads to the formation of elongate pores, through which the sacrificial layer can be removed. According to the method of the invention, the anodization of the Al layer is done with the help of a first mask which defines the area to be anodized, and a second mask which defines a second area to be anodized, said second area surrounding the first area. Anodization of the areas defined by the first and second mask leads to the formation of an anodized structure in the form of a closed ring around the first area, which forms a barrier against unwanted lateral anodization in the first area.

IPC 8 full level

C25D 11/02 (2006.01); C25D 11/04 (2006.01); C25D 11/12 (2006.01); C25D 11/18 (2006.01); C25D 11/24 (2006.01)

CPC (source: EP US)

C25D 11/022 (2013.01 - EP US); C25D 11/08 (2013.01 - EP US); C25D 11/10 (2013.01 - EP US); C25D 11/12 (2013.01 - EP US); C25D 11/18 (2013.01 - EP US); C25D 11/24 (2013.01 - EP US); C25D 11/246 (2013.01 - EP US)

Citation (applicant)

  • HELLIN RICO ET AL., J. ELECTROCHEM. SOC., vol. 154, no. 9, 2007
  • MEI ET AL.: "Formation mechanism of alumina nanotubes and nanowires from highly ordered porous anodic alumina template", JOURNAL OF APPLIED PHYSICS, vol. 97, 2005, pages 034305

Citation (search report)

  • [A] US 5681439 A 19971028 - LEE JAE KYUN [KR]
  • [A] JP S5989794 A 19840524 - CORONA INDUSTRIES
  • [AD] R. HELLIN RICO ET AL: "Fabrication of Porous Membranes for MEMS Packaging by One-Step Anodization in Sulfuric Acid", JOURNAL OF THE ELECTROCHEMICAL SOCIETY, vol. 154, no. 9, 1 January 2007 (2007-01-01), pages K74, XP055013469, ISSN: 0013-4651, DOI: 10.1149/1.2752117
  • [AP] J. ZEKRY ET AL: "Wafer-level thin film vacuum packages for MEMS using nanoporous anodic alumina membranes", 2011 16TH INTERNATIONAL SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS CONFERENCE, 1 June 2011 (2011-06-01), pages 974 - 977, XP055013463, ISBN: 978-1-45-770157-3, DOI: 10.1109/TRANSDUCERS.2011.5969507
  • [AD] Y. F. MEI ET AL: "Formation mechanism of alumina nanotubes and nanowires from highly ordered porous anodic alumina template", JOURNAL OF APPLIED PHYSICS, vol. 97, no. 3, 1 January 2005 (2005-01-01), pages 034305, XP055013470, ISSN: 0021-8979, DOI: 10.1063/1.1846137
  • [A] JOSEPH ZEKRY ET AL: "Thermomechanical design and modeling of porous alumina-based thin film packages for MEMS", 2010 11TH INTERNATIONAL THERMAL, MECHANICAL & MULTI-PHYSICS SIMULATION, AND EXPERIMENTS IN MICROELECTRONICS AND MICROSYSTEMS (EUROSIME), 1 April 2010 (2010-04-01), pages 1 - 7, XP055013465, ISBN: 978-1-42-447026-6, DOI: 10.1109/ESIME.2010.5464584
  • [A] G. D. SULKA ET AL: "Synthesis of Well-Ordered Nanopores by Anodizing Aluminum Foils in Sulfuric Acid", JOURNAL OF THE ELECTROCHEMICAL SOCIETY, vol. 149, no. 7, 1 January 2002 (2002-01-01), pages D97 - D103, XP055013499, ISSN: 0013-4651, DOI: 10.1149/1.1481527
  • [A] HELLIN RICO, R. ET AL: "Alumina porous membranes obtained by one-step anodizing process in H2SO4 for MEMS Packaging", MEET. ABSTR. - ELECTROCHEM. SOC. - 210TH ECS MEETING, 1758, 29 October 2006 (2006-10-29) - 3 November 2006 (2006-11-03), XP002664699, Retrieved from the Internet <URL:http://www.ecsdl.org/getpdf/servlet/GetPDFServlet?filetype=pdf&id=MAECES000602000038001758000001&idtype=cvips&prog=normal> [retrieved on 20111130]

Designated contracting state (EPC)

AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

Designated extension state (EPC)

BA ME

DOCDB simple family (publication)

EP 2458037 A1 20120530; JP 2012117144 A 20120621; US 2012132529 A1 20120531

DOCDB simple family (application)

EP 11162495 A 20110414; JP 2011090274 A 20110414; US 201113086735 A 20110414