EP 2466347 A2 20120620 - Method of manufacturing blazed diffractive grating and method of manufacturing mold for manufacturing blazed diffractive grating
Title (en)
Method of manufacturing blazed diffractive grating and method of manufacturing mold for manufacturing blazed diffractive grating
Title (de)
Verfahren zur Herstellung eines geblazten Beugungsgitters und Verfahren zur Herstellung einer Form zur Herstellung eines geblazten Beugungsgitters
Title (fr)
Procédé de fabrication de réseau à diffraction blazé et procédé de fabrication de moule pour fabriquer un réseau à diffraction blazé
Publication
Application
Priority
JP 2010279865 A 20101215
Abstract (en)
A method of manufacturing a blazed diffractive grating includes a first step of forming a first groove having a first surface (2b) and a second surface (3b) by moving, in the first direction at a first position in the second direction, a cutting tool (12) having a first cutting blade and a second cutting blade to cut the object (13); a second step of forming a second groove by moving, in the first direction at a second position separated from the first position in the second direction by a grating pitch, the cutting tool to cut the object; and a third step of forming a blazed surface (2'b) of the first groove using the first cutting blade by moving, in the first direction at a third position between the first position and the second position, the cutting tool to cut the first surface of the first groove.
IPC 8 full level
B29D 11/00 (2006.01); G02B 5/18 (2006.01)
CPC (source: EP US)
G02B 5/1852 (2013.01 - EP US); B29D 11/00769 (2013.01 - EP US); G02B 5/1857 (2013.01 - EP US); G02B 5/1861 (2013.01 - EP US); Y10T 83/0304 (2015.04 - EP US)
Citation (applicant)
- JP 2002233912 A 20020820 - NIKON CORP
- JP H10209533 A 19980807 - CYMER INC
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
EP 2466347 A2 20120620; EP 2466347 A3 20120704; EP 2466347 B1 20170712; JP 2012125885 A 20120705; JP 5731811 B2 20150610; US 2012152080 A1 20120621; US 9201179 B2 20151201
DOCDB simple family (application)
EP 11189105 A 20111115; JP 2010279865 A 20101215; US 201113316613 A 20111212