EP 2467514 A1 20120627 - PROCESS FOR PREPARING INDIUM OXIDE CONTAINING LAYERS
Title (en)
PROCESS FOR PREPARING INDIUM OXIDE CONTAINING LAYERS
Title (de)
VERFAHREN ZUR HERSTELLUNG INDIUMOXID-HALTIGER SCHICHTEN
Title (fr)
PROCÉDÉ DE PRÉPARATION DE COUCHES COMPRENANT DE L'OXYDE D'INDIUM
Publication
Application
Priority
- DE 102009028801 A 20090821
- EP 2010061805 W 20100813
Abstract (en)
[origin: WO2011020781A1] The invention relates to a liquid-phase method for producing layers containing indium oxide from nonaqueous solution. In said method, an anhydrous composition containing at least one indium oxo-alkoxide of generic formula MxOy(OR)z[O(R'O)cH]aXb[R"OH]d, where x = 3 - 25, y = 1 - 10, z = 3 - 50, a = 0 -25, b = 0 - 20, c = 0 - 1, d = 0 - 25, M = In, R, R', R" = organic group, X = F, Cl, Br, I, and at least one solvent is applied to a substrate, is optionally dried, and is converted into a layer containing indium oxide. The invention also relates to the layers that can be produced using the method of the invention and to the use thereof.
IPC 8 full level
C23C 18/12 (2006.01)
CPC (source: EP KR US)
C23C 18/12 (2013.01 - KR); C23C 18/1216 (2013.01 - EP KR US); C23C 18/1258 (2013.01 - EP KR US)
Citation (search report)
See references of WO 2011020781A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
WO 2011020781 A1 20110224; CN 102549195 A 20120704; CN 102549195 B 20150923; DE 102009028801 B3 20110414; EP 2467514 A1 20120627; EP 2467514 B1 20171025; JP 2013502363 A 20130124; JP 5769709 B2 20150826; KR 101662980 B1 20161005; KR 20120051076 A 20120521; KR 20160096218 A 20160812; TW 201124345 A 20110716; TW I525047 B 20160311; US 2012202318 A1 20120809; US 9315901 B2 20160419
DOCDB simple family (application)
EP 2010061805 W 20100813; CN 201080037332 A 20100813; DE 102009028801 A 20090821; EP 10747843 A 20100813; JP 2012525145 A 20100813; KR 20127007210 A 20100813; KR 20167020825 A 20100813; TW 99127573 A 20100818; US 201013391114 A 20100813