EP 2473645 A1 20120711 - METHOD AND DEVICE FOR COATING SUBSTRATES FROM THE VAPOR PHASE
Title (en)
METHOD AND DEVICE FOR COATING SUBSTRATES FROM THE VAPOR PHASE
Title (de)
VERFAHREN UND VORRICHTUNG ZUR BESCHICHTUNG VON SUBSTRATEN AUS DER DAMPFPHASE
Title (fr)
PROCÉDÉ ET DISPOSITIF DE REVÊTEMENT DE SUBSTRATS À PARTIR DE LA PHASE VAPEUR
Publication
Application
Priority
- DE 102009040086 A 20090904
- EP 2010063031 W 20100906
Abstract (en)
[origin: WO2011026971A1] The invention relates to a method for coating substrates (1) with materials to be vaporized in a vacuum coating system, wherein the vaporization material is deposited on the substrate (1) by double vaporization using an intermediate carrier (3), wherein the intermediate carrier (3) is continuously moved. The aim of the invention is to provide an intermediate carrier that ensures the application in a flow-through coating system. This aim is achieved according to the invention by a cylindrical intermediate carrier (3).
IPC 8 full level
C23C 14/12 (2006.01); C23C 14/24 (2006.01)
CPC (source: EP KR)
C23C 14/12 (2013.01 - EP KR); C23C 14/24 (2013.01 - EP KR)
Citation (search report)
See references of WO 2011026971A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
WO 2011026971 A1 20110310; EP 2473645 A1 20120711; JP 2013503969 A 20130204; KR 101475664 B1 20141223; KR 20120068018 A 20120626
DOCDB simple family (application)
EP 2010063031 W 20100906; EP 10752782 A 20100906; JP 2012527346 A 20100906; KR 20127008751 A 20100906