EP 2474044 A4 20140115 - METHODS AND DEVICES FOR PROCESSING A PRECURSOR LAYER IN A GROUP VIA ENVIRONMENT
Title (en)
METHODS AND DEVICES FOR PROCESSING A PRECURSOR LAYER IN A GROUP VIA ENVIRONMENT
Title (de)
VERFAHREN UND VORRICHTUNGEN ZUR VERARBEITUNG EINER VORLÄUFERSCHICHT IN EINER GRUPPE MITHILFE VON DEREN UMGEBUNG
Title (fr)
PROCÉDÉS ET DISPOSITIFS POUR LE TRAITEMENT D'UNE COUCHE DE PRÉCURSEUR DANS UN ENVIRONNEMENT DE GROUPE VIA
Publication
Application
Priority
- US 24101509 P 20090909
- US 23941609 P 20090902
- US 2010047748 W 20100902
Abstract (en)
[origin: WO2011028957A2] Methods and devices for high-throughput printing of a precursor material for forming a film of a group IB-IIIA- chalcogenide compound are disclosed. In one embodiment, the method comprises forming a precursor layer on a substrate, the precursor is subsequently processed in a VIA environment.
IPC 8 full level
H01L 31/042 (2006.01); H01L 31/18 (2006.01)
CPC (source: EP)
H01L 21/02425 (2013.01); H01L 21/02568 (2013.01); H01L 21/02614 (2013.01); H01L 21/02628 (2013.01); H01L 31/0322 (2013.01); H01L 31/18 (2013.01); Y02E 10/541 (2013.01)
Citation (search report)
- [X] US 2009183675 A1 20090723 - PINARBASI MUSTAFA [US], et al
- See references of WO 2011028957A2
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
WO 2011028957 A2 20110310; WO 2011028957 A3 20110714; EP 2474044 A2 20120711; EP 2474044 A4 20140115; JP 2013504215 A 20130204
DOCDB simple family (application)
US 2010047748 W 20100902; EP 10814527 A 20100902; JP 2012528070 A 20100902