EP 2474046 A1 20120711 - METHOD FOR PRODUCING AND STRUCTURING A ZINC OXIDE LAYER
Title (en)
METHOD FOR PRODUCING AND STRUCTURING A ZINC OXIDE LAYER
Title (de)
VERFAHREN ZUR HERSTELLUNG UND STRUKTURIERUNG EINER ZINKOXIDSCHICHT
Title (fr)
PROCÉDÉ DE PRODUCTION ET STRUCTURATION D'UNE COUCHE D'OXYDE DE ZINC
Publication
Application
Priority
- DE 102009039777 A 20090902
- DE 2010000943 W 20100807
Abstract (en)
[origin: WO2011026455A1] The invention relates to a method for producing ZnO contact layers for solar cells. The layers are etched by means of hydrofluoric acid in order to produce a texture.
IPC 8 full level
H01L 31/18 (2006.01); C23C 14/08 (2006.01); C23C 14/58 (2006.01); H01L 31/0236 (2006.01)
CPC (source: EP US)
C23C 14/086 (2013.01 - EP US); C23C 14/5873 (2013.01 - EP US); H01L 31/0236 (2013.01 - EP US); H01L 31/02366 (2013.01 - EP); H01L 31/1884 (2013.01 - EP US); Y02E 10/50 (2013.01 - EP US)
Citation (search report)
See references of WO 2011026455A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
DE 102009039777 A1 20110303; DE 102009039777 A8 20110601; CN 102687287 A 20120919; CN 102687287 B 20150617; EP 2474046 A1 20120711; JP 2013504184 A 20130204; JP 5469248 B2 20140416; US 2012190209 A1 20120726; US 8894867 B2 20141125; WO 2011026455 A1 20110310
DOCDB simple family (application)
DE 102009039777 A 20090902; CN 201080039156 A 20100807; DE 2010000943 W 20100807; EP 10759568 A 20100807; JP 2012527197 A 20100807; US 201013390391 A 20100807